{"title":"MEMS deformable mirrors for adaptive optics using single crystal PMN-PT","authors":"Hyunkyu Park, D. Horsley","doi":"10.1109/OMEMS.2008.4607843","DOIUrl":null,"url":null,"abstract":"A MEMS-based deformable mirror constructed using single-crystal PMN-PT for use in ophthalmologic adaptive optics is presented. The fabrication process and the results of characterization of the DM are described. A large stroke and high operating bandwidth assure that the DM can be a promising wavefront corrector.","PeriodicalId":402931,"journal":{"name":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","volume":"13 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2008-08-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"4","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/OMEMS.2008.4607843","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 4
Abstract
A MEMS-based deformable mirror constructed using single-crystal PMN-PT for use in ophthalmologic adaptive optics is presented. The fabrication process and the results of characterization of the DM are described. A large stroke and high operating bandwidth assure that the DM can be a promising wavefront corrector.
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