Novel bi-functional film ceramic sensors for environmental applications

W. Qu, W. Wlodarski, R. Green, M. Austin, K. Galatsis
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引用次数: 6

Abstract

Two types of bi-functional film sensors have been developed for environmental applications. The first sensing device is based on n-type semiconducting metal oxide WO/sub 3/ and is fabricated using thin-film surface microfabrication technology. It utilises gas chemisorption at elevated temperatures higher than 300/spl deg/C as well as water physisorption on grain surfaces at temperatures lower then 150/spl deg/C. Both humidity and particular pollution gases such as ozone, NH/sub 3/ and NO/sub 2/ can be detected with high sensitivity and selectivity. The Pt-film heater at the back side of the sensor serves also as a thermometer. The other sensor is composed of Cr/sup 3+/ doped porous perovskite Ba/sub 1-x/Sr/sub x/TiO/sub 3/ (x=0-1) and is fabricated using thick-film technology. It exhibits a change in dielectric constant with respect to temperature variations, while the electrical resistance is a function of humidity. Hence, temperature and humidity can be simultaneously and independently detected by measuring the sensor capacitance and the sensor resistance. Crosstalk between both sensing measurands is negligible.
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用于环境应用的新型双功能薄膜陶瓷传感器
两种类型的双功能薄膜传感器已经开发用于环境应用。第一种传感装置基于n型半导体金属氧化物WO/ sub3 /,采用薄膜表面微加工技术制造。它在高于300/spl℃的高温下利用气体化学吸附,在低于150/spl℃的温度下利用晶粒表面的水物理吸附。湿度和特殊的污染气体,如臭氧,NH/sub - 3/和NO/sub - 2/可以检测高灵敏度和选择性。传感器背面的pt薄膜加热器也可作为温度计使用。另一种传感器由Cr/sup 3+/掺杂多孔钙钛矿Ba/sub 1-x/Sr/sub x/TiO/sub 3/ (x=0-1)组成,采用厚膜技术制备。它表现出介电常数随温度变化而变化,而电阻则是湿度的函数。因此,通过测量传感器电容和传感器电阻,可以同时独立地检测温度和湿度。两个传感测量之间的串扰可以忽略不计。
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