Impact of IC wafer fab and assembly fab processes on package stress induced product reliability issues - an insight into the package stress relief design rules by simulation

Y. Li, M. van Gils, W. V. van Driel, R. van Silfhout, J. Bisschop, J. Janssen, G.Q. Zhang
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引用次数: 1

Abstract

In this work the impact of the layout of the top metal of the integrated circuit (IC) and the most relevant process and material parameters of IC wafer fab and assembly fab on package stress induced damages to the ICs during temperature cycling is studied by means of thermo-mechanical simulations with experimental verifications. Besides die size, the materials for passivation, silicon thickness, molding compound properties, the cohesion between the molding compound and the die surface, and lead frame yield stress, all are found to significantly influence the risk of damages or failures on the IC surface. The results suggest a more complete package stress relief design rule, pointing to a systematic approach to eliminate or suppress the package stress induced damages to the IC and consequently a possibly more efficient use of the silicon area in IC design.
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集成电路晶圆厂和组装厂工艺对封装应力引起的产品可靠性问题的影响——通过仿真深入了解封装应力消除设计规则
本文采用热力学模拟和实验验证的方法,研究了集成电路(IC)顶部金属布局、晶圆厂和组装厂最相关的工艺参数和材料参数对温度循环过程中集成电路封装应力损伤的影响。除模具尺寸外,钝化材料、硅厚度、模塑复合材料性能、模塑复合材料与模具表面的粘聚力、引线框屈服应力等因素都对IC表面的损坏或失效风险有显著影响。研究结果提出了一个更完整的封装应力消除设计规则,指出了一种系统的方法来消除或抑制封装应力引起的IC损伤,从而可能更有效地利用集成电路设计中的硅面积。
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