H. Sugawara, S. Nakamura, M. Oouchi, Y. Kumura, T. Shishido, M. Kishi, M. Tsuchiya
{"title":"Low temperature formation of /spl beta/--FeSi/sub 2/ polycrystalline by pulsed laser deposition and thermal annealing","authors":"H. Sugawara, S. Nakamura, M. Oouchi, Y. Kumura, T. Shishido, M. Kishi, M. Tsuchiya","doi":"10.1109/GROUP4.2004.1416675","DOIUrl":null,"url":null,"abstract":"Polycrystalline /spl beta/-FeSi/sub 2/ droplets were successfully formed by an exceptionally low temperature process: the room temperature pulsed laser deposition and a 350 /spl deg/C post-annealing. Their evidences have been derived by microscopic Raman spectroscopy and TEM observation.","PeriodicalId":299690,"journal":{"name":"First IEEE International Conference on Group IV Photonics, 2004.","volume":"88 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2004-09-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"First IEEE International Conference on Group IV Photonics, 2004.","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/GROUP4.2004.1416675","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
Polycrystalline /spl beta/-FeSi/sub 2/ droplets were successfully formed by an exceptionally low temperature process: the room temperature pulsed laser deposition and a 350 /spl deg/C post-annealing. Their evidences have been derived by microscopic Raman spectroscopy and TEM observation.
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