Electrical characterization of plastic encapsulations using an alternative gate leakage test method

M. van Soestbergen, R. Rongen, J. Knol, A. Mavinkurve, J. Egbers, S. Nath, G.Q. Zhang, L. Ernst
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引用次数: 7

Abstract

The supply current of plastic encapsulated microelectronic devices in the presence of a high potential source can increase abnormally due to parasitic gate leakage. According to reliability qualification standards, stress during a parasitic gate leakage test is applied by a corona discharge at a thin tungsten needle placed a few centimeters above the devices under test. The gate leakage sensitivity factor obtained from this test lacks any physical basis and is therefore not believed to be useful. Here we show that this sensitivity factor can be replaced by a physical model for charge transport through the encapsulation material. The model is used to explain why devices encapsulated by a molding compound with a low volume resistivity of 6 times 1011 Ohm-cm, at high temperature, 150degC, are more prone to fail the test on an increased current, compared to devices encapsulated by a compound having a high resistivity of 4 times 1013 Ohmtimescm at the same temperature. Furthermore, we discuss an alternative test setup where the potential difference between two parallel electrodes sandwiching the devices is used as the source of stress. It is suggested in literature that this setup yields identical results as the current setup. However, using both setups on the same product did not result in an equal outcome, which indicates that both tests do not trigger the same failure mechanism to the same extent.
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用另一种栅极泄漏试验方法测定塑料封装的电气特性
在高电位源存在的情况下,塑料封装微电子器件的供电电流会由于寄生栅泄漏而异常增大。根据可靠性鉴定标准,在寄生栅泄漏试验中,在被测器件上方几厘米处放置一根细钨针,电晕放电施加应力。从这个试验中得到的栅极泄漏灵敏度系数缺乏任何物理基础,因此不被认为是有用的。在这里,我们表明这个灵敏度因子可以被电荷通过封装材料传输的物理模型所取代。该模型用于解释为什么在高温(150℃)下,与在相同温度下具有4倍1013欧姆时间厘米的高电阻率的化合物封装的器件相比,由具有6倍1011欧姆时间厘米的低体积电阻率的模塑化合物封装的器件在增加的电流下更容易失败。此外,我们讨论了另一种测试设置,其中两个平行电极之间的电位差夹在设备中用作应力源。在文献中建议,这种设置产生与当前设置相同的结果。但是,在同一产品上使用两种设置并没有产生相同的结果,这表明两个测试不会在相同程度上触发相同的故障机制。
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