FASE: a scheduling environment for semiconductor fabrication

Abstract

FASE is a computer-aided scheduling environment developed for semiconductor fabrication. Its current version includes: (1) a mid-term and daily scheduler, (2) a machine variability analyzer, (3) a what-if analysis tool and (4) a friendly graphic user interface (GUI). The scheduler is extended from an optimization-based scheduler for a R&D pilot line to a mass production fab application. To identify capacity and cycle time bottlenecks, a variability analyzer is developed, which functions jointly with the scheduler. The what-if analysis tool combines GUI technique, the scheduler and the variability analyzer to answer what-if questions on capacity variation, desired output variation, etc. Test results using field data indicate that FASE provides an decision aid in addressing many issues encountered in scheduling semiconductor fabrication.