Y. Ohira, A. Checkovskiy, T. Yamanoi, T. Endo, H. Fujita, H. Toshiyoshi
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引用次数: 7
Abstract
This paper reports a design and fabrication technique of high-power handling MEMS (micro electro mechanical systems) optical scanner for laser 3D image display application. The MEMS scanner is designed to control the reflection of high-power YAG-laser beam of 5 W (0.5 mW/pulse) by the optomechanical combination of a dielectric-film coated mirror cube and an electrostatic MEMS scanner platform.
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