D. Dubuc, K. Grenier, L. Rabbia, A. Tackac, M. Saadaoui, P. Pons, P. Caudrillier, O. Pascal, H. Aubert, H. Baudrand, J. Tao, P. Combes, J. Graffeuil, R. Plana
{"title":"MEMS and NEMS technologies for wireless communications","authors":"D. Dubuc, K. Grenier, L. Rabbia, A. Tackac, M. Saadaoui, P. Pons, P. Caudrillier, O. Pascal, H. Aubert, H. Baudrand, J. Tao, P. Combes, J. Graffeuil, R. Plana","doi":"10.1109/MIEL.2002.1003153","DOIUrl":null,"url":null,"abstract":"This paper presents a new family of components based on the MEMS and NEMS (nano-electromechanical system) concepts. They show very attractive properties for future wireless communications systems. The design of such components involves both electromagnetic simulations and mechanical and thermal modelling in order to get an accurate description of their electrical behavior.","PeriodicalId":221518,"journal":{"name":"2002 23rd International Conference on Microelectronics. Proceedings (Cat. No.02TH8595)","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2002-08-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"5","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2002 23rd International Conference on Microelectronics. Proceedings (Cat. No.02TH8595)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MIEL.2002.1003153","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 5
Abstract
This paper presents a new family of components based on the MEMS and NEMS (nano-electromechanical system) concepts. They show very attractive properties for future wireless communications systems. The design of such components involves both electromagnetic simulations and mechanical and thermal modelling in order to get an accurate description of their electrical behavior.
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