É. Le Quéré, S. Dauzére-Pérés, S. Astie, Cédric Maufront, Xavier Michallet, G. Bugnon, Nicolas Ferrandini
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引用次数: 0
Abstract
Semiconductor manufacturing is complex and driven by a very strict market in terms of quality, which is ensured by performing many control operations on lots. To reduce the cost of quality, we present a simple algorithm that dynamically cancels lot measurements, i.e. skips lots, that do not bring enough information. The industrial impacts of the algorithm and its implementation in a cloud-based architecture are discussed.
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