Pd effects on the reliability in the low cost Ag bonding wire

J. Cho, Kyeong-Ah Yoo, S. Hong, J. Moon, Yong-Je Lee, Wongil Han, Hanki Park, S. Ha, Seong-Bum Son, S. Kang, K. Oh
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引用次数: 23

Abstract

Recently, the application of Ag bonding wires in electronic devices has been attempted as alternative to Au bonding wires to reduce the material cost of Au. Nevertheless, Ag bonding wires have not been applied to devices due to interface corrosion problems between the Ag wire and Al pad during humidity reliability tests, such as the PCT (Pressure Cooker Test). As the technology for alloying Pd element in Ag wire has developed recently, the corrosive failure problem at the interface in the PCT has been improved significantly. This study examined the behavior of IMCs(intermetallic compounds) and interface corrosion between an Ag wire and Al metallization under humidity conditions (100%RH, 121'C). The chemical compositions of the Ag wires tested were pure Ag, Ag — 1wt%Pd and Ag-3%Pd. These wires are bonded to Al and noble metal(Au, Pd) metallization using a thermo-sonic bonder. The interfaces were characterized by FIB(Focused ion beam), HRTEM (High Resolution Transmission Electron Microscope) and EDS (Energy Dispersive X-ray Spectroscopy) The findings show that, (1) the interfacial reliability between the Ag wire and Ag metallization was improved considerably. The interface corrosion was suppressed significantly as the Pd content was increased. (2) Ag wires on a noble metal(Au, Pd) pad have stable reliability in PCT.
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钯对低成本银焊线可靠性的影响
近年来,人们尝试将银键合线作为金键合线的替代品应用于电子器件中,以降低金的材料成本。然而,由于在湿度可靠性测试(如PCT(压力锅测试))中Ag线和Al垫之间的界面腐蚀问题,Ag键合线尚未应用于设备。近年来,随着银丝中Pd元素合金化技术的发展,PCT界面腐蚀失效问题得到了显著改善。本研究研究了在湿度条件下(100%RH, 121℃),金属间化合物(IMCs)的行为和银丝与Al金属化之间的界面腐蚀。所测银丝的化学成分为纯银、银- 1wt%Pd和银-3%Pd。这些导线用热声键合器与Al和贵金属(Au, Pd)金属化结合。采用FIB(聚焦离子束)、HRTEM(高分辨透射电镜)和EDS(能量色散x射线能谱)对界面进行了表征,结果表明:(1)Ag线与Ag金属化界面的可靠性得到了显著提高。随着钯含量的增加,界面腐蚀得到明显抑制。(2)镀在贵金属(Au, Pd)衬垫上的银丝在PCT中具有稳定的可靠性。
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