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2010 Proceedings 60th Electronic Components and Technology Conference (ECTC)最新文献

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Extending lower-cost packaging technology into next generation signaling: Techniques and considerations 将低成本封装技术扩展到下一代信号:技术和考虑
Pub Date : 2010-06-01 DOI: 10.1109/ECTC.2010.5490809
M. Doyle, J. Bartley, R. Ericson, M. Bailey, P. Germann, G. Zettles
Current industry trends, combined with present cost pressures shall force signal integrity engineers to revisit traditional “rules of thumb” such that additional bandwidth can be obtained from conventional (standard) packaging materials and methodologies. In this paper, the authors assert that some current design practices prematurely cap the useful bandwidth of current technology, and unnecessarily lead designers to ask material scientists to solve our bandwidth concerns. Every facet of the electronics industry is subject to cost pressures. Opposite these financial constraints is the continuing drive to improve performance. Every new product must evaluate the business case for the use or inclusion of a new technology, more expensive component, or increase in power. The larger design community tends to move together into and out of technology “nodes” as they become more feasible and cost effective. Whether or not a particular technology is effective at meeting the design and business goals is a function of what other technologies and consequences are traded off in order to use it. This paper examines the conventional wisdom of some common practices, in light of an attempt to forego the use of advanced packaging technologies while extending the practical life of lower-cost techniques to signaling interfaces with higher frequency content.
当前的行业趋势,加上当前的成本压力,将迫使信号完整性工程师重新审视传统的“经验法则”,以便从传统(标准)封装材料和方法中获得额外的带宽。在本文中,作者断言,当前的一些设计实践过早地限制了当前技术的有用带宽,并且不必要地导致设计师要求材料科学家解决我们的带宽问题。电子工业的方方面面都受到成本压力的影响。与这些财务限制相反的是不断提高业绩的动力。每个新产品都必须评估使用或包含新技术、更昂贵的组件或功率增加的业务案例。当技术“节点”变得更可行、成本更有效时,更大的设计社区倾向于一起进出技术“节点”。一项特定的技术是否能够有效地满足设计和业务目标,是为了使用它而权衡其他技术和结果的一个功能。本文在尝试放弃使用先进封装技术的同时,将低成本技术的实际寿命延长到具有更高频率内容的信号接口的情况下,研究了一些常见实践的传统智慧。
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引用次数: 0
Integrated process for defect-free copper plating and chemical-mechanical polishing of through-silicon vias for 3D interconnects 三维互连无缺陷镀铜和硅通孔化学机械抛光的集成工艺
Pub Date : 2010-06-01 DOI: 10.1109/ECTC.2010.5490731
D. Malta, C. Gregory, D. Temple, T. Knutson, Chen Wang, T. Richardson, Yun Zhang, R. Rhoades
The fabrication of through-silicon vias (TSVs) is a major component in the development of three-dimensional (3D) integration technology and advanced 3D packaging approaches. The large diameter and length of TSVs, as compared to traditional interconnects, create some unique process challenges. Via plating and chemical-mechanical polishing (CMP) processes used in standard copper interconnect technology are generally not suitable for TSV fabrication. Therefore, efforts are being made to develop such processes specifically for TSV technology. This paper will describe the development of a void-free Cu electroplating process for TSV filling, along with CMP processing to remove the overburden layer and expose the Cu-filled vias for subsequent metallization. The focus of the paper will be the integration of the TSV plating and CMP processes, with discussion regarding observed integration challenges and their solutions. First, a Cu electroplating process was developed for defect-free, bottom-up filling of silicon vias from 20–200µm in diameter and 150–375µm deep, with aspect ratios from 1:1 to 8:1. Next, CMP tests were conducted using Cu-filled silicon vias of 50µm diameter and 150µm depth, designed for use in a MEMS wafer-level packaging application. These tests indicated that plating nonuniformity and Cu mound defects over filled vias caused significant CMP process issues. The plating process was then modified to eliminate these problems in the Cu films, resulting in improved CMP uniformity and reduced polishing time.
硅通孔(tsv)的制造是三维(3D)集成技术和先进3D封装方法发展的重要组成部分。与传统的互连相比,tsv的大直径和长度带来了一些独特的工艺挑战。在标准铜互连技术中使用的通孔镀和化学机械抛光(CMP)工艺通常不适合制造TSV。因此,正在努力开发专门用于TSV技术的这种工艺。本文将介绍一种用于TSV填充的无空隙镀铜工艺的发展,以及CMP工艺,以去除覆盖层并暴露Cu填充孔,以进行后续的金属化。本文的重点是TSV电镀和CMP工艺的集成,并讨论了观察到的集成挑战及其解决方案。首先,开发了一种铜电镀工艺,用于自底向上填充直径20-200µm,深度150-375µm的硅孔,宽高比为1:1 ~ 8:1。接下来,使用直径为50 μ m,深度为150 μ m的cu填充硅通孔进行CMP测试,该通孔设计用于MEMS晶圆级封装应用。这些测试表明,镀层不均匀性和铜丘缺陷在填充孔上造成了显著的CMP工艺问题。然后对电镀工艺进行了改进,以消除Cu膜中的这些问题,从而提高了CMP的均匀性并缩短了抛光时间。
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引用次数: 36
Design, process integration and characterization of wafer level vacuum packaging for MEMS resonator MEMS谐振器晶圆级真空封装的设计、制程整合与表征
Pub Date : 2010-06-01 DOI: 10.1109/ECTC.2010.5490754
A. Yu, C. Premachandran, R. Nagarajan, C.W. Kyoung, Lam Quynh Trang, Rakesh Kumar, L. Lim, J. H. Han, Yap Guan Jie, P. Damaruganath
This paper discusses wafer level vacuum sealing technology with evaporated AuSn solder for a microelectromechanical systems (MEMS) resonator without getter material. The MEMS resonator is fabricated and characterized in a vacuum chamber. Relationship between the Q-factor of the MEMS resonator and the vacuum level is established and used as a reference for later vacuum level calibration. Wafer bonding using evaporated AuSn solder is performed in an EVG wafer bonder. With optimized bonding conditions, the achieved shear strength is higher than 59 MPa and uniform cross-section of the bonding ring has been achieved. The calculated He leakage rate is between 10−13 atm cc/s and 10−14 atm cc/s. By comparing the measured Q-factor of packaged resonator with the reference curve, the corresponding vacuum level is 0.2 Torr. Reliability tests results show that shear strength decreases for 7% and still high enough for real application. The vacuum level after reliability tests is comparable to that of long term vacuum level.
本文讨论了无吸气剂材料的微机电系统(MEMS)谐振腔用蒸发AuSn焊料圆片级真空密封技术。MEMS谐振器是在真空室中制备和表征的。建立了MEMS谐振器的q因子与真空度之间的关系,作为后续真空度标定的参考。在EVG晶圆键合机中使用蒸发AuSn焊料进行晶圆键合。在优化的粘接条件下,获得的抗剪强度大于59 MPa,粘接环截面均匀。计算出He泄漏速率范围为10 ~ 13atm cc/s ~ 10 ~ 14atm cc/s。通过与参考曲线的比较,封装腔的q因子测量值为0.2 Torr。可靠性试验结果表明,抗剪强度降低7%,但仍能满足实际应用要求。可靠性试验后的真空度与长期真空度相当。
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引用次数: 10
Investigation of bump crack and deformation on Pb-free flip chip packages 无铅倒装芯片封装的碰撞裂纹和变形研究
Pub Date : 2010-06-01 DOI: 10.1109/ECTC.2010.5490791
Jeremias P. Libres, J. C. Arroyo
The demand for die to package interconnects free of Pb in the next generation flip chip packages requires a flux and underfill solution that meets package reliability requirements. Bump cracks and bump deformation were observed during temperature cycling on large body, full Pb-free ceramic flip chip BGA packages during initial package development. The phenomenon is considered unique in terms of its nature and failure mechanism. Traditional bump crack issues are concentrated at or near the silicon and underfill interfaces. In this case, cracks occurred within the bulk solder away from either silicon or substrate interface. Failed bumps also showed severe deformation. In addition, morphology differences in the underfill material surrounding the affected bumps provided important clues as to the nature of the failure mechanism. An extensive investigation to understand the root cause of the unique bump crack issue in the bulk solder, which covered both process and material-related factors, resulted in a clear understanding of the failure mechanism and the implementation of an effective solution to the problem. This manuscript describes the relationship of the flux residue-underfill interaction, the localized change in underfill properties due to the flux residues, and eventually the impact of this change on the bump integrity during package stressing. These findings made it possible to establish a good flux-underfill selection methodology to achieve a robust Pb-free package solution that is being implemented in next generation flip chip products.
在下一代倒装芯片封装中,对无铅封装互连的需求需要满足封装可靠性要求的通量和下填充解决方案。在初始封装开发过程中,对大型全无铅陶瓷倒装芯片BGA封装进行温度循环,观察到凹凸裂纹和凹凸变形。这种现象在其性质和失效机制方面被认为是独特的。传统的凹凸裂纹问题主要集中在硅和下填料界面附近。在这种情况下,裂纹发生在远离硅或衬底界面的大块焊料内。失败的凸起也显示出严重的变形。此外,受影响凸起周围的下填料的形态差异为破坏机制的性质提供了重要线索。为了了解大块焊料中独特的凹凸裂纹问题的根本原因,包括工艺和材料相关因素,我们进行了广泛的调查,从而清楚地了解了失效机制,并实施了有效的解决方案。本文描述了残渣与下填料相互作用的关系,残渣对下填料性能的局部变化,以及这种变化对包体受力过程中凸块完整性的最终影响。这些发现使得建立一个良好的通量下填充选择方法成为可能,以实现健壮的无铅封装解决方案,该解决方案正在下一代倒装芯片产品中实施。
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引用次数: 7
Temperature dependence of thin film spiral inductors on Alumina over a temperature range of 25 to 475° C 氧化铝薄膜螺旋电感在25至475°C温度范围内的温度依赖性
Pub Date : 2010-06-01 DOI: 10.1109/ECTC.2010.5490775
G. Ponchak, J. Jordan, M. Scardelletti
In this paper, we present an analysis of inductors on an Alumina substrate over the temperature range of 25 to 475° C. Five sets of inductors, each set consisting of a 1.5, 2.5, 3.5, and a 4.5 turn inductor with different line width and spacing, were measured on a high temperature probe station from 10 MHz to 30 GHz. From these measured characteristics, it is shown that the inductance is nearly independent of temperature for low frequencies compared to the self resonant frequency, the parasitic capacitances are independent of temperature, and the resistance varies nearly linearly with temperature. These characteristics result in the self resonant frequency decreasing by only a few percent as the temperature is increased from 25 to 475° C, but the maximum quality factor decreases by a factor of 2 to 3. These observations based on measured data are confirmed through 2D simulations using Sonnet software.
在本文中,我们在温度范围为25至475°c的氧化铝基板上分析了电感器,在10 MHz至30 GHz的高温探针站上测量了五组电感器,每组电感器由1.5、2.5、3.5和4.5匝电感组成,其线宽和间距不同。从这些测量特性可以看出,与自谐振频率相比,低频电感几乎与温度无关,寄生电容与温度无关,电阻几乎与温度呈线性变化。当温度从25°C增加到475°C时,这些特性导致自谐振频率仅下降几个百分点,但最大质量因子降低了2到3倍。这些基于测量数据的观察结果通过Sonnet软件的二维模拟得到了证实。
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引用次数: 14
Inkjet printed organic transistors for sustainable electronics 用于可持续电子学的喷墨印刷有机晶体管
Pub Date : 2010-06-01 DOI: 10.1109/ECTC.2010.5490659
G. Orecchini, R. Zhang, J. Agar, D. Staiculescu, M. Tentzeris, L. Roselli, C. Wong
Embedded paper electronics is a promising solution for the future of electronics, and thus the goal for this paper is to show the pathway toward achieving inkjet solutions for the realization of complex circuitry on the cheapest synthetic material made by humankind: PAPER. A direct write technology, inkjet printing transfers the designed pattern directly to the substrate. Inkjet technologies have gained a lot of ground as a more accurate and economic fabrication method than traditional lithography. The challenge of this work is to identify the right materials and to show the printability of all the building blocks of an organic field-effect transistor (OTFT). For the semiconductor, a highly soluble pentacene precursor, 13,6-N-Sulfinylacetamidopentacene, is proposed. Anisole, a high boiling point solvent is chosen to insure proper jetting of the solution. The solution jets well and it has to be used right after preparation as its printability degrades with time. For the gate dielectric, two solutions are proposed: (i) using the paper itself as an insulator and print a bottom gate device on both sides of a double sided glossy paper, (ii) a pentacene impurity, of 6,13-pentacenequinone (PQ), in a top gate configuration, which may improve the device mobility by reducing the scattering sites at the semiconductor-dielectric interface. For the electrodes, a printable nano-particle based silver ink has to be modified to match the work function with pentacene, or replaced with an alternate printable material like Carbon Nanotubes (CNTs). Preliminary electrical testing of the pentacene film printed directly on paper shows good conduction properties for a 25 µm channel length. Further improvement of the pentacene film performance is proposed. This work establishes the foundation for the first fully printed OTFT on paper.
嵌入式纸质电子产品是未来电子产品的一个很有前途的解决方案,因此本文的目标是展示实现喷墨解决方案的途径,以实现人类最便宜的合成材料:纸上的复杂电路。一种直接写入技术,喷墨印刷将设计的图案直接转移到承印物上。喷墨技术作为一种比传统光刻技术更精确、更经济的制造方法而获得了广泛的应用。这项工作的挑战在于确定合适的材料,并展示有机场效应晶体管(OTFT)的所有构建块的可印刷性。对于半导体,提出了一种高可溶性的并戊烯前体13,6- n -亚砜酰乙酰胺对戊烯。苯甲醚,一种高沸点的溶剂选择,以确保适当的喷射溶液。溶液喷射良好,它必须在制备后立即使用,因为它的印刷性随着时间的推移而降低。对于栅极介质,提出了两种解决方案:(i)使用纸张本身作为绝缘体,在双面光面纸的两侧打印底部栅极器件;(ii)在顶部栅极配置中添加6,13-pentacenequinone (PQ)的并五苯杂质,通过减少半导体-介电界面上的散射位,可以提高器件的迁移率。对于电极,基于纳米颗粒的可打印银墨水必须被修改以匹配并五苯的功函数,或者用碳纳米管(CNTs)等替代可打印材料代替。直接印刷在纸上的并五苯薄膜的初步电学测试表明,在25 μ m通道长度下,该薄膜具有良好的导电性能。提出了进一步改进并五苯薄膜性能的方法。这项工作为第一个完全印刷在纸上的OTFT奠定了基础。
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引用次数: 10
A study of package warpage for package on package (PoP) 包对包(PoP)包装翘曲的研究
Pub Date : 2010-06-01 DOI: 10.1109/ECTC.2010.5490967
M. Amagai, Yutaka Suzuki
Package warpage is a primary concern in a package-on-package. To enhance the accuracy of modeling prediction, viscoelastic parameters, the change of material properties after injection mold cure (IMC) and post mold cure (PMC) temperature and it's time, and cure shrinkage were studied with a dynamic modulus analysis (DMA) and a thermal mechanical analysis (TMA) for a mold compound. A nano-indentation tool was used to characterize a viscoelasticity of underfill material. Material properties obtained from the TMA, DMA and nano-indentation tools were introduced to finite-element-based models. The validation of models was verified with a shadow moiré for package warpage.
在包对包中,包翘曲是一个主要问题。为了提高建模预测的准确性,采用动态模量分析(DMA)和热力学分析(TMA)对模具复合材料的粘弹性参数、注射模固化(IMC)后和模后固化(PMC)温度和时间的材料性能变化以及固化收缩进行了研究。采用纳米压痕工具对下填料的粘弹性进行了表征。通过TMA, DMA和纳米压痕工具获得的材料性能被引入到基于有限元的模型中。通过对包装翘曲的阴影监测,验证了模型的有效性。
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引用次数: 22
An investigation of reliability and solder joint microstructure evolution of select Pb-free FCBGA pad finish and solder ball alloy combinations 选择无铅FCBGA焊面和焊球合金组合的可靠性和焊点组织演变研究
Pub Date : 2010-06-01 DOI: 10.1109/ECTC.2010.5490723
D. Cavasin
As Pb-free packaging technologies evolve, increased emphasis has been placed on the development of robust mechanical and metallurgical solutions. A number of different component and PCB surface finish options are now widely available, as are several different BGA solder ball alloys. Similarly, various different Pb-free C4 bumping alloys are being introduced, compounding the need for clear understanding of how the resulting interconnect systems stand up to the normal rigors of end-user applications. This paper focuses on the component-level reliability and metallurgical evolution of the C4 (flip chip) and BGA interconnect systems formed by the combination of commonly specified surface finishes and BGA solder alloys. The two surface finishes selected were electroless Ni/electroless Pd/immersion Au (ENEPIG), and immersion Sn (IT). The selected BGA alloys were Sn-3Ag-0.5Cu (SAC305) and Sn-3.5Ag. All four of these alloy/pad finish combinations were found to pass the various industry-standard (JEDEC) reliability stress tests without any failures, as measured through open/short testing and CSAM analyses of the packages. However, significant differences in microstructural evolution of the solder/substrate interfaces were observed.
随着无铅封装技术的发展,越来越多的重点放在开发强大的机械和冶金解决方案上。许多不同的组件和PCB表面处理选择现在广泛可用,因为是几种不同的BGA焊料球合金。同样,各种不同的无铅C4碰撞合金正在被引入,这就需要清楚地了解所得到的互连系统如何经得起最终用户应用的正常严格要求。本文重点研究了C4(倒装芯片)和BGA互连系统的组件级可靠性和冶金演变,该互连系统由通用表面处理和BGA焊料合金组合而成。选择的两种表面处理分别是化学镀镍/化学镀钯/浸镀金(ENEPIG)和浸镀锡(IT)。选择的BGA合金为Sn-3Ag-0.5Cu (SAC305)和Sn-3.5Ag。所有这四种合金/垫面涂层组合都通过了各种行业标准(JEDEC)可靠性压力测试,没有任何故障,通过对封装的开放/短测试和CSAM分析进行了测量。然而,观察到焊料/衬底界面的微观组织演变有显著差异。
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引用次数: 2
Comparative study of PWB pad cratering subject to reflow soldering and thermal impact 回流焊与热冲击对PWB焊盘成形的影响
Pub Date : 2010-06-01 DOI: 10.1109/ECTC.2010.5490929
Chaoran Yang, F. Song, S. Lee, K. Newman
Pad cratering is one of the dominant failure modes that occur in various board level reliability tests, especially under the dynamic loading. In recent years, the increasing propensity of pad cratering due to the implementation of the lead-free technology calls for the necessity of re-assessment of PWB qualification related to the pad cratering resistance. The objective of the present study is to establish a test method for evaluating the pad cratering resistance of PWB and studying the PWB degradation mechanism subject to different high temperature conditions. Three kinds of PWB with different resin systems were investigated, including one phenolic-cured system board and two dicy-cured system boards. Tg and Td of the selected PWBs were characterized using TMA and TGA. The detailed cold ball pull test procedure is presented and different pull jaws with/without standoff are evaluated in this paper. The effects of multiple reflows, thermal aging and temperature cycling on the pad cratering resistance of PWBs are discussed as well.
在各种板级可靠性试验中,尤其是在动载荷作用下,焊盘撞击是主要的失效形式之一。近年来,由于无铅技术的实施,焊盘击穿的可能性越来越大,因此有必要重新评估与焊盘抗击穿相关的PWB资格。本研究的目的是建立一种评估压水板耐垫坑性能的测试方法,研究不同高温条件下压水板的降解机理。研究了三种不同树脂体系的印制板,包括一种酚醛固化体系板和两种酚醛固化体系板。采用TMA和TGA对所选PWBs的Tg和Td进行了表征。本文给出了详细的冷球拉力试验程序,并对不同的拉爪进行了评估。讨论了多次回流、热老化和温度循环对印制板抗焊坑性能的影响。
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引用次数: 10
Fracture mechanics of lead-free solder joints under cyclic shear load 循环剪切载荷作用下无铅焊点断裂力学
Pub Date : 2010-06-01 DOI: 10.1109/ECTC.2010.5490928
Huili Xu, W. Bang, Hongtao Ma, Tae-Kyu Lee, K. Liu, C. Kim
This paper reports the experimental and theoretical exploration of the fracture mechanism active in BGA lead-free solder assemblies under high speed shear fatigue test conditions. Our investigation finds that, contrary to common assumption, the crack growth in shear fatigue is not governed by shear stress but more by crack opening stress. Our theoretical analysis indicates that fracture by crack opening mode prevails because non-uniformity in the shear deformation of solder joint creates a body rotation which results in crack opening stress rather than shear. While the crack growth in shear fatigue is found to vary sensitively with variation in the mechanical constraints on the assembly, such as solder shape and elastic modulus of the chip mold, it is also sensitive to variation in solder microstructure. This, the sensitivity to the assembly constraints and solder microstructure, makes it ideal in investigating fatigue properties of solder joints as well as identifying the structural and microstructural features responsible for reliability failure.
本文报道了在高速剪切疲劳试验条件下BGA无铅焊料组件断裂机理的实验和理论探索。我们的研究发现,与通常的假设相反,剪切疲劳下的裂纹扩展不受剪切应力的支配,而更多地受裂纹张开应力的支配。我们的理论分析表明,由于焊点剪切变形的不均匀性造成了体的旋转,从而导致了裂纹打开应力而不是剪切应力,因此以裂纹打开模式断裂是普遍存在的。剪切疲劳下的裂纹扩展随着焊料形状和切屑模具弹性模量等装配机械约束的变化而敏感地变化,同时对焊料微观结构的变化也很敏感。这一点,对装配约束和焊料微观结构的敏感性,使其成为研究焊点疲劳特性以及识别导致可靠性失效的结构和微观结构特征的理想选择。
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引用次数: 6
期刊
2010 Proceedings 60th Electronic Components and Technology Conference (ECTC)
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