L. Tiemeijer, R. Havens, R. de Kort, Y. Bouttement, P. Deixler, M. Ryczek
{"title":"Predictive spiral inductor compact model for frequency and time domain","authors":"L. Tiemeijer, R. Havens, R. de Kort, Y. Bouttement, P. Deixler, M. Ryczek","doi":"10.1109/IEDM.2003.1269418","DOIUrl":null,"url":null,"abstract":"A highly accurate predictive inductor model for integrated symmetric inductors with center tap and patterned ground shield is presented. This model is based on a modified Greenhouse algorithm where current crowding due to skin and proximity effects is included by considering the spread in parallel sub-loop inductances. This scalable symmetrical inductor equivalent circuit model covers all operating conditions, and yet only requires dimensions and back-end layer thicknesses. We have verified this scalable model for a large number of inductors from three industrial IC processes and found excellent agreement with measured inductances, Q-factors, and resonance frequencies.","PeriodicalId":344286,"journal":{"name":"IEEE International Electron Devices Meeting 2003","volume":"75 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2003-12-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"34","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"IEEE International Electron Devices Meeting 2003","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IEDM.2003.1269418","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 34
Abstract
A highly accurate predictive inductor model for integrated symmetric inductors with center tap and patterned ground shield is presented. This model is based on a modified Greenhouse algorithm where current crowding due to skin and proximity effects is included by considering the spread in parallel sub-loop inductances. This scalable symmetrical inductor equivalent circuit model covers all operating conditions, and yet only requires dimensions and back-end layer thicknesses. We have verified this scalable model for a large number of inductors from three industrial IC processes and found excellent agreement with measured inductances, Q-factors, and resonance frequencies.
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