Long wavelength quantum well laser diodes grown by metalorganic chemical vapor deposition

A. Kasukawa, H. Okamoto
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Abstract

Long-wavelength GaInAs(P)/InP quantum well laser diodes (QW LDs) are described with respect to the epitaxial growth technique used, their QW structure, and the cavity design. QW LDs with graded-index separate-confinement heterostructure (GRIN-SCH), grown by metalorganic chemical vapor deposition (MOCVD), exhibit low threshold current density (410 A/cm/sup 2/), low threshold current (6 mA), high characteristic temperature (153 K), and high output power (100 mW). Preliminary aging tests have been carried out at 50 degrees C, 5 mW and at 70 degrees C, 5 mW. N appreciable change in driving current was seen after 7000 h, indicating the high reliability of these devices.<>
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金属有机化学气相沉积制备长波量子阱激光二极管
介绍了长波GaInAs(P)/InP量子阱激光二极管(QW ld)的外延生长技术、量子阱结构和腔体设计。采用金属有机化学气相沉积(MOCVD)生长的梯度指数分离约束异质结构(GRIN-SCH) QW ld具有低阈值电流密度(410 A/cm/sup 2/)、低阈值电流(6 mA)、高特征温度(153 K)和高输出功率(100 mW)。在50℃,5mw和70℃,5mw的条件下进行了初步老化试验。在7000 h后,驱动电流无明显变化,表明这些器件的高可靠性。
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