Design And Fabrication of Anautomatic Mode Controlled Vibratory Gyroscope

19th IEEE International Conference on Micro Electro Mechanical Systems Pub Date : 2006-05-08 DOI:10.1109/MEMSYS.2006.1627889

W. Sung, J.Y. Lee, J.G. Lee, T. Kang

引用次数: 22

Abstract

In this paper, we present a new approach for performance enhancement of MEMS vibratory gyroscope by means of automatic mode control scheme. The suggested method automatically tunes resonant frequencies of two lateral modes to be identically matched. This draws sensitivity improvement of the sensor and removes manual tuning effort, which are desirable features to achieve a high performance for the mass productive sensor like vibratory gyroscopes. In this paper, we designed and fabricated an electrostatically tunable gyro structure of parallel-type sensing electrodes and automatic mode tuning circuit that utilizes a PLL-based two self-oscillation loops for both driving and sensing mode.

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一种自动模控振动陀螺仪的设计与制造

本文提出了一种利用自动模式控制方案来提高MEMS振动陀螺仪性能的新方法。所提出的方法自动调谐两个横向模式的谐振频率，使其相同匹配。这提高了传感器的灵敏度，并消除了手动调谐的努力，这是实现大规模生产传感器(如振动陀螺仪)高性能的理想功能。在本文中，我们设计并制造了一个并联式传感电极和自动模式调谐电路的静电可调谐陀螺结构，该结构利用基于锁相环的两个自振荡回路作为驱动和传感模式。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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19th IEEE International Conference on Micro Electro Mechanical Systems

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