{"title":"Growth and properties of GaSb and Al/sub x/Ga/sub 1-x/Sb layers by MOCVD","authors":"A. H. Ramelan, K. Drozdowicz-Tomsia, T. Tansley","doi":"10.1109/COMMAD.1998.791690","DOIUrl":null,"url":null,"abstract":"A study of structural, electrical and optical properties of GaSb and Al/sub x/Ga/sub 1-x/Sb (0.05/spl les/x/spl les/0.25) grown by metalorganic chemical vapour deposition on GaAs, GaSb and Ge substrates using TMAl, TMGa, and TMSb is reported. The optimum growth window established for GaSb growth (temperature 540/spl deg/C and V/III=0.72) is significantly different from optimal growth parameters for AlGaSb layers. Higher V/III ratios and higher temperatures are required to protect the surface morphology of AlGaSb. All Al/sub x/Ga/sub 1-x/Sb in the investigated composition range 0.05/spl les/x/spl les/0.25 were grown at 580/spl deg/C and 800/spl deg/C and V/III ratio=3 and are characterized by excellent, smooth morphology, very high optical transmission and electrical parameters comparable with the best reported for this type of layer.","PeriodicalId":300064,"journal":{"name":"1998 Conference on Optoelectronic and Microelectronic Materials and Devices. Proceedings (Cat. No.98EX140)","volume":"8 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1998-12-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"1998 Conference on Optoelectronic and Microelectronic Materials and Devices. Proceedings (Cat. No.98EX140)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/COMMAD.1998.791690","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
A study of structural, electrical and optical properties of GaSb and Al/sub x/Ga/sub 1-x/Sb (0.05/spl les/x/spl les/0.25) grown by metalorganic chemical vapour deposition on GaAs, GaSb and Ge substrates using TMAl, TMGa, and TMSb is reported. The optimum growth window established for GaSb growth (temperature 540/spl deg/C and V/III=0.72) is significantly different from optimal growth parameters for AlGaSb layers. Higher V/III ratios and higher temperatures are required to protect the surface morphology of AlGaSb. All Al/sub x/Ga/sub 1-x/Sb in the investigated composition range 0.05/spl les/x/spl les/0.25 were grown at 580/spl deg/C and 800/spl deg/C and V/III ratio=3 and are characterized by excellent, smooth morphology, very high optical transmission and electrical parameters comparable with the best reported for this type of layer.
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