Shiyu Sun, Shashank Sharma, K. V. Rao, B. Ng, D. Kouzminov, B. Colombeau, N. Variam, S. Muthukrishnan, A. Mayur, A. Brand
{"title":"Integration of millisecond and spike anneals for dopant activation optimization","authors":"Shiyu Sun, Shashank Sharma, K. V. Rao, B. Ng, D. Kouzminov, B. Colombeau, N. Variam, S. Muthukrishnan, A. Mayur, A. Brand","doi":"10.1109/IWJT.2013.6644512","DOIUrl":null,"url":null,"abstract":"The effects of anneal sequences (ms anneal followed by spike anneal vs. spike anneal followed by ms anneal) were explored. Substantial anneal sequence effects on dopant activation were also reported.","PeriodicalId":196705,"journal":{"name":"2013 13th International Workshop on Junction Technology (IWJT)","volume":"37 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2013-06-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2013 13th International Workshop on Junction Technology (IWJT)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IWJT.2013.6644512","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1
Abstract
The effects of anneal sequences (ms anneal followed by spike anneal vs. spike anneal followed by ms anneal) were explored. Substantial anneal sequence effects on dopant activation were also reported.
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