A dynamic system regulation measure for increasing effective capacity: the X-factor theory

D. Delp, J. Si, Y. Hwang, B. Pei
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引用次数: 16

Abstract

Due to the complex nature of semiconductor manufacturing it is evident that a single scheduling or regulation technique cannot best optimize the system dynamics for reducing cycle time and increasing throughput. The throughput of the system can increase to the effective capacity level of the system. When the throughput of the system approaches the effective capacity the product cycle time can dramatically increase. The "knee" of the performance curve indicates an operating point for fabs to maximize throughput while keeping the product cycle time relatively low. By increasing the effective capacity, i.e. adding a machine or improving a process, the product cycle time can be lowered or the system throughput increased by producing a shift in the "knee" of the performance curve. The bottleneck, typically defined as the most heavily utilized machine group, is often the target for increasing the system effective capacity. We will analyze the bottleneck along with other system capacity regulation measures to systematically study the relationship between bottleneck, X-factor, cycle time, and throughput measurements.
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提高有效容量的动态系统调控措施:x因素理论
由于半导体制造的复杂性,很明显,单一的调度或调节技术不能最好地优化系统动力学,以减少周期时间和增加吞吐量。系统的吞吐量可以提高到系统的有效容量水平。当系统的生产能力接近有效容量时,产品周期时间会显著增加。性能曲线的“拐点”表示晶圆厂在保持相对较低的产品周期时间的同时最大限度地提高产量的工作点。通过增加有效产能,即增加一台机器或改进一个工艺,可以通过在性能曲线的“拐点”上产生位移来降低产品周期时间或增加系统吞吐量。瓶颈通常被定义为使用率最高的机器组,通常是增加系统有效容量的目标。我们将分析瓶颈以及其他系统容量调节措施,以系统地研究瓶颈、x因素、周期时间和吞吐量测量之间的关系。
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