Effects of a-C:Fe Catalyst Deposition Method on the Growth of Carbon Nanotubes

K. P. Yung, B. Tay
{"title":"Effects of a-C:Fe Catalyst Deposition Method on the Growth of Carbon Nanotubes","authors":"K. P. Yung, B. Tay","doi":"10.1109/NANOEL.2006.1609755","DOIUrl":null,"url":null,"abstract":"Carbon nanotubes were grown using RF magnetron sputtering or Filtered Cathodic Vacuum Arc (FCVA) deposited iron containing atmosphere carbon (a-C: Fe) films as catalyst, by Hot filament chemical vapor deposition (HFCVD). The chemical structure of the catalyst layers was studied by X-ray diffraction (XRD) and the morphology of the films was analyzed by scanning electron microscope (SEM). Randomly orientated carbon nanotubes film was found on sputtered a-C:Fe catalyst, while well-aligned carbon nanotubes were observed on FCVA deposited a-C:Fe catalyst. The diameters of the nanotubes grown on sputtered a-C:Fe follow to that of the annealed catalyst particles grain size. However, the diameters of the nanotubes from FCVA a-C: Fe were much smaller than the grain size of the catalyst particles they grown from","PeriodicalId":220722,"journal":{"name":"2006 IEEE Conference on Emerging Technologies - Nanoelectronics","volume":"4 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2006-03-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2006 IEEE Conference on Emerging Technologies - Nanoelectronics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/NANOEL.2006.1609755","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0

Abstract

Carbon nanotubes were grown using RF magnetron sputtering or Filtered Cathodic Vacuum Arc (FCVA) deposited iron containing atmosphere carbon (a-C: Fe) films as catalyst, by Hot filament chemical vapor deposition (HFCVD). The chemical structure of the catalyst layers was studied by X-ray diffraction (XRD) and the morphology of the films was analyzed by scanning electron microscope (SEM). Randomly orientated carbon nanotubes film was found on sputtered a-C:Fe catalyst, while well-aligned carbon nanotubes were observed on FCVA deposited a-C:Fe catalyst. The diameters of the nanotubes grown on sputtered a-C:Fe follow to that of the annealed catalyst particles grain size. However, the diameters of the nanotubes from FCVA a-C: Fe were much smaller than the grain size of the catalyst particles they grown from
查看原文
分享 分享
微信好友 朋友圈 QQ好友 复制链接
本刊更多论文
a-C:Fe催化剂沉积法对碳纳米管生长的影响
采用热丝化学气相沉积(HFCVD)技术,采用射频磁控溅射或过滤阴极真空电弧(FCVA)沉积含气氛碳(a-C: Fe)薄膜作为催化剂,制备了碳纳米管。用x射线衍射(XRD)研究了催化剂层的化学结构,并用扫描电镜(SEM)分析了膜的形貌。在溅射的a-C:Fe催化剂上发现了随机取向的碳纳米管薄膜,而在FCVA沉积的a-C:Fe催化剂上发现了排列良好的碳纳米管薄膜。在a-C:Fe溅射表面生长的纳米管直径与退火后催化剂颗粒的粒径一致。然而,由FCVA a-C: Fe制成的纳米管的直径远远小于它们生长的催化剂颗粒的晶粒尺寸
本文章由计算机程序翻译,如有差异,请以英文原文为准。
求助全文
约1分钟内获得全文 去求助
来源期刊
自引率
0.00%
发文量
0
期刊最新文献
Nanostructuring surfaces with slow multiply-charged ions Programming Efficiency of Stacked-Gate Flash Memories with High-κ Dielectrics Identification and rapid screen based on immune sensor Nanotube based Vertical Nano-devices for High Integration Density Investigation of Nano-Scale Single Crystal Silicon Using the Atomistic-Continuum Mechanics with Stillinger-Weber Potential Function
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
现在去查看 取消
×
提示
确定
0
微信
客服QQ
Book学术公众号 扫码关注我们
反馈
×
意见反馈
请填写您的意见或建议
请填写您的手机或邮箱
已复制链接
已复制链接
快去分享给好友吧!
我知道了
×
扫码分享
扫码分享
Book学术官方微信
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术
文献互助 智能选刊 最新文献 互助须知 联系我们:info@booksci.cn
Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。
Copyright © 2023 Book学术 All rights reserved.
ghs 京公网安备 11010802042870号 京ICP备2023020795号-1