{"title":"Effects of a-C:Fe Catalyst Deposition Method on the Growth of Carbon Nanotubes","authors":"K. P. Yung, B. Tay","doi":"10.1109/NANOEL.2006.1609755","DOIUrl":null,"url":null,"abstract":"Carbon nanotubes were grown using RF magnetron sputtering or Filtered Cathodic Vacuum Arc (FCVA) deposited iron containing atmosphere carbon (a-C: Fe) films as catalyst, by Hot filament chemical vapor deposition (HFCVD). The chemical structure of the catalyst layers was studied by X-ray diffraction (XRD) and the morphology of the films was analyzed by scanning electron microscope (SEM). Randomly orientated carbon nanotubes film was found on sputtered a-C:Fe catalyst, while well-aligned carbon nanotubes were observed on FCVA deposited a-C:Fe catalyst. The diameters of the nanotubes grown on sputtered a-C:Fe follow to that of the annealed catalyst particles grain size. However, the diameters of the nanotubes from FCVA a-C: Fe were much smaller than the grain size of the catalyst particles they grown from","PeriodicalId":220722,"journal":{"name":"2006 IEEE Conference on Emerging Technologies - Nanoelectronics","volume":"4 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2006-03-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2006 IEEE Conference on Emerging Technologies - Nanoelectronics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/NANOEL.2006.1609755","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
Carbon nanotubes were grown using RF magnetron sputtering or Filtered Cathodic Vacuum Arc (FCVA) deposited iron containing atmosphere carbon (a-C: Fe) films as catalyst, by Hot filament chemical vapor deposition (HFCVD). The chemical structure of the catalyst layers was studied by X-ray diffraction (XRD) and the morphology of the films was analyzed by scanning electron microscope (SEM). Randomly orientated carbon nanotubes film was found on sputtered a-C:Fe catalyst, while well-aligned carbon nanotubes were observed on FCVA deposited a-C:Fe catalyst. The diameters of the nanotubes grown on sputtered a-C:Fe follow to that of the annealed catalyst particles grain size. However, the diameters of the nanotubes from FCVA a-C: Fe were much smaller than the grain size of the catalyst particles they grown from