Estimation of deflections by interferometry in a cantilever array and its optimization based on a two-scale model

Abstract

In this paper, our attention is focused on a two-scale model based algorithm for deflection estimation of array of Atomic force microscopes (AFM) in quasi-static regime by interferometry. In a previous work, an algorithm based on three measurements by cantilever was introduced to compute their displacements in quasi-static regime. Here, we propose an improvement so that two measurements only are required. This is based on a published two-scale model of such array. Numerical simulation results of topographic scan by an array of AFMs on a sample surface are reported. The simulations are carried out with a model calibrated from a device which design optimization is also discussed here.