Carrier freeze-out in strained p-Si/sub 1-x/Ge/sub x/ layers

Zhang Wan-rong, Li Zhi-guo, Luo Jin-sheng, Chang Yao-Hai, Chen Jian-xin, Shen Guang-di
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Abstract

In this paper, the carrier freeze-out in strained p-Si/sub 1-x/Ge/sub x/ layers grown on [001] substrates is studied analytically. It is found that as the Ge fraction increases, the valence effective density of states (N/sub V/)/sub SiGe//(N/sub V/)Si normalized by that in Si decreases. Furthermore, as the temperature becomes lower, the decrease in (N/sub V/)/sub SiGe//(N/sub V/)Si becomes more rapid. It is also show that as the Ge fraction increases, although it has little effect on the ionized doping concentration at room temperature, the ionized doping concentration increases at low temperatures compared with that in Si. This implies that carrier freeze-out is mitigated at low temperatures, which can have a beneficial effect on the operation of Si/sub -x/Ge/sub x/-based devices at low temperatures.
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应变p-Si/sub - 1-x/Ge/sub -x/层中载流子冻出
本文分析研究了在[001]衬底上生长的p-Si/sub - 1-x/Ge/sub -x/应变层中的载流子冻出现象。发现随着Ge分数的增加,经Si归一化的(N/sub V/)/sub SiGe//(N/sub V/)Si态的价态有效密度减小。随着温度的降低,(N/sub V/)/sub SiGe//(N/sub V/)Si的下降速度加快。结果还表明,随着Ge分数的增加,虽然在室温下对电离掺杂浓度的影响不大,但在低温下电离掺杂浓度比在Si中增加。这意味着载流子冻结在低温下得到缓解,这可能对Si/sub -x/Ge/sub -x/基器件在低温下的工作产生有益的影响。
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