Technological Parameters and Edge Fringing Capacitance in GaN Schottky Barrier Diodes: Monte Carlo Simulations

B. Orfao, B. G. Vasallo, D. Moro-Melgar, M. Zaknoune, G. Gioia, M. Samnouni, S. Pérez, T. González, J. Mateos
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Abstract

Schottky barrier diodes (SBDs) with realistic geometries have been studied by means of a 2-D ensemble Monte Carlo simulator. The non-linearity of the Capacitance-Voltage (C-V) characteristic is the most important parameter for optimizing SBDs as frequency multipliers. In this paper, by changing the values of several technological parameters, we analyze their influence on the edge fringing capacitance in a GaN SBD. We have found that the parameters related with the dielectric used for the passivation and the lateral extension of the epilayer significantly affect the fringing capacitance, thus increasing the value of the total capacitance above the ideal one.
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GaN肖特基势垒二极管的工艺参数和边缘边缘电容:蒙特卡罗模拟
利用二维系综蒙特卡罗模拟器对具有真实几何形状的肖特基势垒二极管进行了研究。电容-电压(C-V)特性的非线性是优化sdd作为倍频器的最重要参数。本文通过改变几个工艺参数的值,分析了它们对氮化镓SBD中边缘边缘电容的影响。我们发现,钝化所用介质的相关参数和脱毛层的横向延伸对边缘电容有显著影响,从而使总电容值高于理想值。
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