T. Kawahara, K. Torii, R. Mitsuhashi, A. Mutoh, A. Horiuchi, H. Ito, H. Kitajima
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引用次数: 4
Abstract
In this paper, we investigated the influence of the combination of precursors on the deposition rate, the uniformity, the amount of residual impurities, together with electrical properties.
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