Modelling of the mechanical behaviour of copper in 2nd level interconnection structures

Steffen Wiese, F. Kraemer
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引用次数: 4

Abstract

The paper presents an approach to model the mechanical behaviour of copper in 2nd level interconnect structures in electronic assemblies. The discussed mechanical models were analysed in ANSYS and LS-DYNA FEM-Software in order to simulate the performance of typical structural elements in electronic assemblies, such as copper traces or solder pads. Loading conditions span a wide range from low rate deformation of thermal cycles to high rate deformation during drop testing. This study investigated the effect of different mechanical properties of copper, with respect to the stress-strain relationship in 2nd level interconnects. The effect of the anisotropy of Young's modulus, in addition to the effect of isotropic cyclic hardening on the resulting deformation and stresses in the copper structures, were analysed. Furthermore, the resulting contact forces at the copper pad to the solder and to the PCB epoxy material, were investigated. This paper presents specific observations made during the three-dimensional finite element simulations of typical interconnect structures. Microstructural investigations were also carried out, such as to be able to correlate particular mechanical behaviour with established knowledge about copper as an FCC material. Grain sizes and texture of real copper traces are estimated. This study relates these particular features of real structures in electronic assemblies to published properties of copper mono- and polycrystalline materials. The importance of microstructural properties, such as grain size and orientation in terms of their respective influence on the results, are also discussed.
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铜在二级互连结构中的力学行为建模
本文提出了一种模拟电子组件中二级互连结构中铜的力学行为的方法。在ANSYS和LS-DYNA有限元软件中对所讨论的力学模型进行了分析,以模拟电子组件中典型结构元件(如铜迹或焊盘)的性能。加载条件跨度很大,从热循环的低速率变形到跌落试验中的高速率变形。本文研究了铜的不同力学性能对二级互连中应力-应变关系的影响。分析了杨氏模量的各向异性以及各向同性循环硬化对铜结构变形和应力的影响。此外,还研究了铜焊盘与焊料和PCB环氧材料的接触力。本文介绍了典型互连结构三维有限元模拟的具体观察结果。微观结构研究也进行了,例如能够将特定的机械行为与关于铜作为FCC材料的既定知识联系起来。估计了真实铜迹的晶粒尺寸和结构。本研究将电子组件中真实结构的这些特征与已发表的铜单晶和多晶材料的特性联系起来。本文还讨论了晶粒尺寸和取向等微观组织特性对结果的影响。
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