{"title":"Tuning a process while performing SPC: an approach based on the sequential design of experiments","authors":"E. Sachs, Á. Ingólfsson, S. Ha","doi":"10.1109/ASMC.1990.111236","DOIUrl":null,"url":null,"abstract":"An approach to process control called generalized SPC which allows for the diagnosis of a process while the process is being tuned is discussed. A control module, the run by run controller, that implements a form of adaptive control based on the sequential design of experiments is discussed. Statistical process control is compared to the run by run controller.<<ETX>>","PeriodicalId":158760,"journal":{"name":"IEEE/SEMI Conference on Advanced Semiconductor Manufacturing Workshop","volume":"3 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1990-09-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"8","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"IEEE/SEMI Conference on Advanced Semiconductor Manufacturing Workshop","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ASMC.1990.111236","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 8
Abstract
An approach to process control called generalized SPC which allows for the diagnosis of a process while the process is being tuned is discussed. A control module, the run by run controller, that implements a form of adaptive control based on the sequential design of experiments is discussed. Statistical process control is compared to the run by run controller.<>
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