{"title":"Yield Enhancement","authors":"D. Wilcox, Slava Libman","doi":"10.1109/smtw.2004.1393719","DOIUrl":null,"url":null,"abstract":"The Yield Enhancement focus area is dedicated to activity ensuring that semiconductor manufacturing set up is optimized towards identifying, reducing, and avoiding yield-relevant defects and contamination.","PeriodicalId":160542,"journal":{"name":"2021 IEEE International Roadmap for Devices and Systems Outbriefs","volume":"45 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2021-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"7","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2021 IEEE International Roadmap for Devices and Systems Outbriefs","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/smtw.2004.1393719","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 7
Abstract
The Yield Enhancement focus area is dedicated to activity ensuring that semiconductor manufacturing set up is optimized towards identifying, reducing, and avoiding yield-relevant defects and contamination.
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