Fault Tolerant Active Pixel Sensors in 0.18 and 0.35 Micron Technologies

M. L. Haye, C. Jung, David Chen, G. Chapman, J. Dudas
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引用次数: 6

Abstract

A fault tolerant active pixel sensor (FTAPS) has been designed and fabricated to correct for point defects that occur in CMOS image sensors both at manufacturing and over the lifetime of the sensor. For some time it has been known that fabrication of CMOS image sensors in processes less than 0.35mum would generate significant performance changes, yet imagers are being fabricated in 0.18mum technology or smaller. Therefore the characteristics of the FTAPS are presented for pixels fabricated in both a standard 0.18mum and 0.35mum CMOS process and compared for consistency
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0.18和0.35微米技术的容错有源像素传感器
设计和制造了一种容错有源像素传感器(FTAPS),以纠正CMOS图像传感器在制造和使用寿命期间出现的点缺陷。一段时间以来,人们已经知道,在小于0.35 μ m的工艺中制造CMOS图像传感器将产生显着的性能变化,但成像仪正在以0.18 μ m或更小的工艺制造。因此,介绍了在标准0.18和0.35 μ m CMOS工艺中制造的像素的FTAPS特性,并比较了其一致性
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