{"title":"A MEMS variable optical attenuator","authors":"R. Wood, V. Dhuler, E. Hill","doi":"10.1109/OMEMS.2000.879656","DOIUrl":null,"url":null,"abstract":"The need for smaller and more capable attenuators has motivated the application of MEMS technology to produce a compact variable optical attenuator suitable for optical telecommunications environments. In this paper we describe a silicon-MEMS device that employs a simple thermal actuator to variably move a gold/silicon attenuation vane into the optical path.","PeriodicalId":148819,"journal":{"name":"2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)","volume":"39 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2000-08-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"17","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/OMEMS.2000.879656","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 17
Abstract
The need for smaller and more capable attenuators has motivated the application of MEMS technology to produce a compact variable optical attenuator suitable for optical telecommunications environments. In this paper we describe a silicon-MEMS device that employs a simple thermal actuator to variably move a gold/silicon attenuation vane into the optical path.
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