Design of tunable shunt and series interdigital capacitors based on vanadium dioxide thin film

Liangyu Li, Weisong Wang, E. Shin, T. Quach, G. Subramanyam
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引用次数: 3

Abstract

Tunable coplanar waveguide interdigital capacitors (IDC) designed with vanadium dioxide (VO2) thin film are presented in this paper. Two different configurations, series IDC and shunt IDC, are proposed. Tunable capacitance can be implemented by the thermally controllable VO2 thin film. The tunability of IDC structures are 95.6% and 85.4% corresponding to the series IDC and shunt IDC, respectively.
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基于二氧化钒薄膜的可调谐并联及串联数字间电容器的设计
介绍了用二氧化钒(VO2)薄膜设计的可调谐共面波导数字间电容器(IDC)。提出了串联IDC和并联IDC两种不同的配置方案。可调电容可以通过热可控的VO2薄膜实现。串联IDC和并联IDC对应的IDC结构可调性分别为95.6%和85.4%。
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