{"title":"A ΣΔ sense chain using chopped integrators for ultra-low-noise MEMS system","authors":"C. Fraisse, A. Nagari","doi":"10.1109/ESSCIRC.2016.7598265","DOIUrl":null,"url":null,"abstract":"The sense path design for new MEMS applications requires up to 20-Bit dynamic range in small low-frequency bandwidth removing the offset and 1/f noise. In this paper a new sense chain design, aimed to reach 19-Bit dynamic range in 150Hz bandwidth has been presented implementing a new full-chopper system using chopped integrators. The proposed sense path has been successfully inserted into a new gyroscope MEMS based device with a target of 1.5mdps/sqrt(Hz) noise. The circuit has been implemented in 0.13μm CMOS technology.","PeriodicalId":246471,"journal":{"name":"ESSCIRC Conference 2016: 42nd European Solid-State Circuits Conference","volume":"113 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2016-09-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"ESSCIRC Conference 2016: 42nd European Solid-State Circuits Conference","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ESSCIRC.2016.7598265","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 2
Abstract
The sense path design for new MEMS applications requires up to 20-Bit dynamic range in small low-frequency bandwidth removing the offset and 1/f noise. In this paper a new sense chain design, aimed to reach 19-Bit dynamic range in 150Hz bandwidth has been presented implementing a new full-chopper system using chopped integrators. The proposed sense path has been successfully inserted into a new gyroscope MEMS based device with a target of 1.5mdps/sqrt(Hz) noise. The circuit has been implemented in 0.13μm CMOS technology.
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