{"title":"Recent progress in thin film shape memory microactuators","authors":"A. Johnson, E. Shahoian","doi":"10.1109/MEMSYS.1995.472577","DOIUrl":null,"url":null,"abstract":"We are developing the technology of heat actuated shape-memory alloy (SMA) thin film microdevices. Shape-memory alloys undergo a crystalline phase change when heated or cooled above ambient. This phase change is accompanied by a change in elastic modulus. The premier application of these microactuators lies in miniature valves, but other potential applications include miniature connectors, switches, and end effectors for microrobotic manipulators. The advantage of SMA film actuators is their ability to produce large forces and displacements within small spaces at voltages compatible with electronics.","PeriodicalId":273283,"journal":{"name":"Proceedings IEEE Micro Electro Mechanical Systems. 1995","volume":"21 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1995-01-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"21","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings IEEE Micro Electro Mechanical Systems. 1995","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MEMSYS.1995.472577","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 21
Abstract
We are developing the technology of heat actuated shape-memory alloy (SMA) thin film microdevices. Shape-memory alloys undergo a crystalline phase change when heated or cooled above ambient. This phase change is accompanied by a change in elastic modulus. The premier application of these microactuators lies in miniature valves, but other potential applications include miniature connectors, switches, and end effectors for microrobotic manipulators. The advantage of SMA film actuators is their ability to produce large forces and displacements within small spaces at voltages compatible with electronics.
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