The use of Plasma Chemistry in Failure Analysis

Abstract

Recently, low temperature plasmas of excited gasses have been used to selectively remove materials for analytical purposes. In replacing high herrperature ashing or wet chemical digestiorn, the plasma treatment has proven valuab le because of its selectivity, gentleness, cleanliness and safety. With this method, one can avoid volatile mineral losses, phase changes, trace contaminations and undesireable material loss. This process has particular applications in Failure Analysis with the removal of plastic encapsulations and passivation layers.