Successive charging/discharging of gate oxides in SOI MOSFETs by sequential hot electron stressing of front/back channel

A. Zaleski, D. Ioannou, G. Campisi, H. Hughes
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引用次数: 2

Abstract

The purpose of this work is to demonstrate that hot electron stressing one channel in a SOI MOSFET can in fact inject charges into the other channel, and it discusses two important applications of this phenomenon: namely, that it can be used as a new tool for the study of the mechanisms of degradation, and for designing erasing schemes for SOI based flash memories. The measurements were performed on partially and fully depleted SIMOX MOSFETs with LDD and channel lengths down to 0.6 /spl mu/m.<>
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利用前后通道顺序热电子应力对SOI mosfet栅极氧化物进行连续充放电
这项工作的目的是证明热电子在SOI MOSFET中施加一个通道实际上可以将电荷注入另一个通道,并讨论了这一现象的两个重要应用:即,它可以用作研究退化机制的新工具,并用于设计基于SOI的闪存的擦除方案。测量是在部分耗尽和完全耗尽的SIMOX mosfet上进行的,LDD和沟道长度低至0.6 /spl mu/m。
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