{"title":"Manipulation of polymer solubility: crosslinking, thermal activation and variable-temperature bakes","authors":"Jacob Sitterly, Justin Nhan, R. Brainard","doi":"10.1117/12.2659165","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":183950,"journal":{"name":"Advances in Patterning Materials and Processes XL","volume":"6 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2023-04-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Advances in Patterning Materials and Processes XL","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.2659165","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
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