A. Develioglu, T. Allenet, M. Vockenhuber, L. van Lent-Protasova, I. Mochi, Y. Ekinci, D. Kazazis
{"title":"The EUV lithography resist screening activities in H2-2022","authors":"A. Develioglu, T. Allenet, M. Vockenhuber, L. van Lent-Protasova, I. Mochi, Y. Ekinci, D. Kazazis","doi":"10.1117/12.2660859","DOIUrl":"https://doi.org/10.1117/12.2660859","url":null,"abstract":"","PeriodicalId":183950,"journal":{"name":"Advances in Patterning Materials and Processes XL","volume":"133 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-05-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122907835","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Andreia Santos, Wesley Zanders, Elke Caron, M. Harumoto, J. Vandereyken, J. Hermans, V. Truffert, S. Halder, Ronald Otten, Leon van Dijk, Richard J. F. van Haren
{"title":"Track integrated backside cleaning solution: impact of backside contamination on printing distortions","authors":"Andreia Santos, Wesley Zanders, Elke Caron, M. Harumoto, J. Vandereyken, J. Hermans, V. Truffert, S. Halder, Ronald Otten, Leon van Dijk, Richard J. F. van Haren","doi":"10.1117/12.2658418","DOIUrl":"https://doi.org/10.1117/12.2658418","url":null,"abstract":"","PeriodicalId":183950,"journal":{"name":"Advances in Patterning Materials and Processes XL","volume":"34 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-05-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133852968","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Manipulation of polymer solubility: crosslinking, thermal activation and variable-temperature bakes","authors":"Jacob Sitterly, Justin Nhan, R. Brainard","doi":"10.1117/12.2659165","DOIUrl":"https://doi.org/10.1117/12.2659165","url":null,"abstract":"","PeriodicalId":183950,"journal":{"name":"Advances in Patterning Materials and Processes XL","volume":"6 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-04-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125706209","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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