{"title":"Sensitivity Analysis of Calibration Standards for SOLT and LRRM","authors":"A. Safwat, L. Hayden","doi":"10.1109/ARFTG.2001.327488","DOIUrl":null,"url":null,"abstract":"We investigate the sensitivity of SOLT and LRRM on wafer calibrations to probe positioning. Calibration comparison derived error-bounds were calculated for data sets differing only by a single change in probe/standard overlap. The SOLT calibration was found to be significantly more sensitive to probe placement variations, consistent with theoretical predictions.","PeriodicalId":331830,"journal":{"name":"58th ARFTG Conference Digest","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2001-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"35","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"58th ARFTG Conference Digest","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ARFTG.2001.327488","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 35
Abstract
We investigate the sensitivity of SOLT and LRRM on wafer calibrations to probe positioning. Calibration comparison derived error-bounds were calculated for data sets differing only by a single change in probe/standard overlap. The SOLT calibration was found to be significantly more sensitive to probe placement variations, consistent with theoretical predictions.
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