C. Rembe, M. Hart, M. Helmbrecht, U. Srinivasan, R. Muller, K. Y. Lau, R. Howe
{"title":"Stroboscopic interferometer with variable magnification to measure dynamics in an adaptive-optics micromirror","authors":"C. Rembe, M. Hart, M. Helmbrecht, U. Srinivasan, R. Muller, K. Y. Lau, R. Howe","doi":"10.1109/OMEMS.2000.879632","DOIUrl":null,"url":null,"abstract":"Interferometry has proven a powerful tool to measure out-of-plane movements in MEMS with high accuracy, In this paper, we demonstrate a setup for stroboscopic interferometry that combines the precise data registration obtained by combining phase-shifting techniques with the high spatial resolution and aperture that are characteristic for an optical microscope.","PeriodicalId":148819,"journal":{"name":"2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)","volume":"8 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2000-08-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"16","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/OMEMS.2000.879632","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 16
Abstract
Interferometry has proven a powerful tool to measure out-of-plane movements in MEMS with high accuracy, In this paper, we demonstrate a setup for stroboscopic interferometry that combines the precise data registration obtained by combining phase-shifting techniques with the high spatial resolution and aperture that are characteristic for an optical microscope.
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