Self-consistent quasi-static C-V characteristics of In1−xGaxSb XOI FET

Md Nur Kutubul Alam, M. Islam, Md.R. Islam
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引用次数: 1

Abstract

In1-xGaxSb XOI nFET is proposed and its capacitance-voltage (CV) characteristics are investigated. One dimensional coupled Schrödinger-Poisson equation is solved to calculate charge and hence to the capacitance. Well known SILVACO's ATLAS device simulation package is used to carry out the simulation. It is found that the CV characteristic as well as the threshold voltage of the proposed device depend on different process parameters like doping concentration, channel composition, channel thickness, gate oxide and oxide thickness, and operating temperature. Doping dependent threshold voltage shift is related with maximum allowable doping level, and which is also important for understanding enhancement mode operation.
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In1−xGaxSb XOI场效应管的自一致准静态C-V特性
提出了一种In1-xGaxSb - XOI非净场效应晶体管,并对其电容电压特性进行了研究。通过求解一维耦合Schrödinger-Poisson方程来计算电荷和电容。采用著名的SILVACO公司的ATLAS设备仿真包进行仿真。研究发现,该器件的CV特性和阈值电压取决于不同的工艺参数,如掺杂浓度、沟道组成、沟道厚度、栅极氧化物和氧化物厚度以及工作温度。与掺杂相关的阈值电压偏移与最大允许掺杂水平有关,这对于理解增强模式的工作也很重要。
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