{"title":"Micromachined silicon nitride solid immersion lenses","authors":"K. Crozier, D. A. Fletcher, G. Kino, C. Quate","doi":"10.1109/OMEMS.2000.879660","DOIUrl":null,"url":null,"abstract":"We present a method for fabricating silicon nitride solid immersion lenses (SIL) integrated with atomic force microscope cantilevers. We demonstrate that a 200 nm line/space transmission grating (400 nm period) may be resolved using the SIL with /spl lambda/=633 nm illumination. Based on the refractive index (/spl sim/1.9 for PECVD silicon nitride) and geometry of the SIL, the effective numerical aperture is calculated to be /spl sim/1.8.","PeriodicalId":148819,"journal":{"name":"2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)","volume":"30 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2000-08-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/OMEMS.2000.879660","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1
Abstract
We present a method for fabricating silicon nitride solid immersion lenses (SIL) integrated with atomic force microscope cantilevers. We demonstrate that a 200 nm line/space transmission grating (400 nm period) may be resolved using the SIL with /spl lambda/=633 nm illumination. Based on the refractive index (/spl sim/1.9 for PECVD silicon nitride) and geometry of the SIL, the effective numerical aperture is calculated to be /spl sim/1.8.
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