Progress in the ITO/InP solar cell

T. Gessert, X. Li, M. Wanlass, T. Coutts
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引用次数: 7

Abstract

The development history of the hybrid and bulk devices and, in particular, the use of H/sub 2/ in the sputtering gas is summarized. The fabrication of the cell is described. Efforts to understand the dependence of the ITO/InP cell V/sub oc/ on the fabrication parameters, which have relied extensively on the PCIV doping profiling technique, are discussed. The results indicate that the V/sub oc/ increase observed for both hybrid and bulk cells as the hydrogen partial pressure is increased is due to the observed reduction and grading of the base doping, likely caused by H/sub 2/ passivation of Zn acceptors.<>
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ITO/InP太阳能电池的进展
总结了混合和块体器件的发展历史,特别是H/sub 2/在溅射气体中的应用。描述了电池的制造过程。本文讨论了ITO/InP电池V/sub / oc/对制造参数的依赖性,这些参数广泛依赖于PCIV掺杂分析技术。结果表明,随着氢分压的增加,杂化电池和体电池的V/sub /升高是由于碱掺杂的减少和分级,可能是由Zn受体的H/sub /钝化引起的。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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