Evolution and expansion of SOI in VLSI technologies: Planar to 3D

Abstract

□ SOI has enabled industry leadership in planar CMOS exemplified by both digital and analog mixed-signal applications □ Innovative future opportunities for SOI as Industry moves to Fully Depleted Architectures and beyond Uniformity and Variability control are at the forefront! □ Paradigm shift in SOI value proposition as FinFET era arrives.