Diamond microstructure replicas from silicon masters

Abstract

We are developing a microstructure technology for thick film diamond replicas, using deposition by hot filament CVD on microstructured silicon. This technology is primarily intended to make micromechanical structures for building-sets, fluidic cooling systems, systems for biochemical analyses and processes, and moulds for thermoplastic microstructures. In the thick film deposition on trenches in silicon, complete filling was possible with an aspect ratio up to 1.6. At higher aspect ratios, voids or channels are formed within the diamond replica. Ridges, trenches and capillary channels with high resolution coverage and low roughness, rms<2 nm, were created. Demonstrator structures for microfluidic, building-sets and polymer moulding applications are presented.