Behavior of radiation-induced defects in bipolar oxides during irradiation and annealing in hydrogen-rich and -depleted ambients

X.J. Chen, H. Barnaby, R. Pease, P. Adell
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Abstract

The results of this study showed that when excess hydrogen is introduced to gated bipolar devices in the radiation environment, the buildup of radiation-induced defects in device oxides and their annealing behaviors are dramatically changed due to hydrogen. The different annealing behaviors of oxide charge between hydrogen-rich and -depleted devices suggest that the defects contributing to the enhanced oxide charge may be microscopically different from the conventional trapped charge described in literature.
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富氢和贫氢环境下双极氧化物辐照和退火过程中辐射诱导缺陷的行为
研究结果表明,在辐射环境下,当过量的氢被引入到门控双极器件中时,氢会极大地改变器件氧化物中辐射缺陷的形成及其退火行为。富氢和贫氢器件氧化电荷的不同退火行为表明,导致氧化电荷增强的缺陷可能与文献中描述的常规捕获电荷在微观上不同。
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