Iron doped semi-insulating GaInP lattice matched to GaAs for device fabrication

S. Lourdudoss, R. Holz
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Abstract

I-V curves of semi-insulating Ga/sub 0.51/In/sub 0.49/P:Fe (E/sub g/=1.9 eV) with various Fe concentrations obtained at 125/spl deg/C are presented, The shapes of these curves are characteristic of the measurements made at 100 to 200/spl deg/C. The I-V behaviour of the material is different if Fe concentration is below or above 1.5/spl times/10/sup 17/ cm/sup -3/. Differential resistivity derived from these curves also exhibits a maximum at Fe=1.5/spl times/10/sup 17/ cm/sup -3/. These observations indicate that the cause of semi-insulation may be different below and above this concentration. It is suggested that Fe may be mostly site incorporated in the low concentration regime and mostly in the form of Fe-P complexes in the high concentration regime, A GaInP/GaInAsP/GaAs buried heterostructure with semi-insulating Ga/sub 0.51/In/sub 0.49/P:Fe regrowth has been fabricated for the first time to demonstrate the usefulness of the investigated material in device fabrication.
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与GaAs匹配的铁掺杂半绝缘GaInP晶格用于器件制造
给出了在125/spl℃下不同Fe浓度下半绝缘Ga/sub 0.51/In/sub 0.49/P:Fe (E/sub g/=1.9 eV)的I-V曲线,这些曲线的形状是在100 ~ 200/spl℃下测量的特征曲线。当铁浓度低于或高于1.5/spl倍/10/sup 17/ cm/sup -3/时,材料的I-V行为不同。由这些曲线得出的差分电阻率在Fe=1.5/spl倍/10/sup 17/ cm/sup -3/时也显示出最大值。这些观察结果表明,在此浓度以下和高于此浓度时,半绝缘的原因可能不同。本文首次制备了具有半绝缘Ga/sub 0.51/ in /sub 0.49/P的GaInP/GaInAsP/GaAs埋置异质结构,证明了该材料在器件制造中的应用价值。
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