{"title":"Fabrication of Photonic Crystals","authors":"G. Subramaniam","doi":"10.1109/NANOEL.2006.1609747","DOIUrl":null,"url":null,"abstract":"Fabrication of 3-D PBGM is a four stage process: the synthesis of monodisperse spherical particles, their self-assembly to form a template, infiltration of materials of interest and removal of template. The template was formed on a substrate by the self-assembly or electrophoretic deposition of silica into a FCC structure. Infiltrations of interstitial spaces were tried by sputtering and by in situ chemical reactions.","PeriodicalId":220722,"journal":{"name":"2006 IEEE Conference on Emerging Technologies - Nanoelectronics","volume":"45 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2006-03-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"5","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2006 IEEE Conference on Emerging Technologies - Nanoelectronics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/NANOEL.2006.1609747","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 5
Abstract
Fabrication of 3-D PBGM is a four stage process: the synthesis of monodisperse spherical particles, their self-assembly to form a template, infiltration of materials of interest and removal of template. The template was formed on a substrate by the self-assembly or electrophoretic deposition of silica into a FCC structure. Infiltrations of interstitial spaces were tried by sputtering and by in situ chemical reactions.
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