Micro parts reinforced by addition of unidirectional whiskers in laser photolithography

K. Yamaguchi, T. Nakamoto, Takayoshi Obata
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Abstract

—Laser photolithography is a useful method for producing micro parts. One of the main factors affecting the accuracy of the polymer part is shrinkage during solidification. The shrinkage has an effect on the irradiated energy distribution on the polymer because the polymer is shrinking during the irradiation. The shrinkage and irradiated energy distribution cause manufacturing errors. The manufacturing accuracy when producing a micro part is calculated in this paper. Next, the polymer part is reinforced by addition of unidirectional whiskers. Whiskers are added to the liquid photopolymer and this mixture is placed in a vessel that has electrodes. By applying direct current (DC) to the electrodes, the axis of the whiskers in the liquid polymer is aligned along the direction of the electric field. The polymer is solidified by the irradiation of UV laser during the application of the direct current. The shrinkage ratio during the solidification is decreased and the tensile strength of the polymer part is increased by the addition of unidirectional whiskers.
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激光光刻中单向晶须增强微零件
激光光刻是一种生产微型零件的有效方法。影响聚合物零件精度的主要因素之一是凝固过程中的收缩。由于聚合物在辐照过程中收缩,因此收缩对辐照能量在聚合物上的分布有影响。收缩和辐照能量分布导致制造误差。本文对微零件的加工精度进行了计算。接下来,通过添加单向晶须来增强聚合物部分。须被添加到液体光聚合物中,这种混合物被放置在一个有电极的容器中。通过对电极施加直流电(DC),液体聚合物中晶须的轴线沿着电场方向排列。在直流电的作用下,紫外激光的照射使聚合物固化。单向晶须的加入降低了凝固过程中的收缩率,提高了聚合物部件的抗拉强度。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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