Pub Date : 2002-04-01DOI: 10.1163/156856302766647143
H. Fujita, T. Iizuka
Micro-actuators are developed for a hard disk drive application. The aim is to obtain a high density of data storage by positioning the read and write head element precisely. The desired specifications are a displacement of ±0.5 μm, operating voltage of 20 V and a structural resonance frequency of 15 kHz. We manufactured the metallic actuator by using thick photoresist lithography and nickel electroplating. The electrostatic gap between the mover and the stator has a high aspect ratio, in order to achieve low voltage operation. We deposited a copper layer by electroplating as a vertical sacrificial layer. Then we removed the copper layer at last process step to make the electrostatic gap with high aspect ratio. We utilize a photoresist which has a thickness of 10 μm as the first trial. We completed the process and operated the actuator successfully. We also developed a silicon actuator using the silicon deep etching and deposition technology. We use an Inductive Coupled Plasma-Reactive Ion Etching (ICP-RIE) machine for silicon etching and a Low Pressure Chemical Vapor Deposition (LPCVD) machine for deposition of the vertical sacrificial layer of SiO2 and the mover structure of polySi. We obtained an actuator which had thickness of 100 μm with the electrode gap having a aspect ratio of 50.
{"title":"Fabrication of electrostatic micro-actuators for a hard disk drive application","authors":"H. Fujita, T. Iizuka","doi":"10.1163/156856302766647143","DOIUrl":"https://doi.org/10.1163/156856302766647143","url":null,"abstract":"Micro-actuators are developed for a hard disk drive application. The aim is to obtain a high density of data storage by positioning the read and write head element precisely. The desired specifications are a displacement of ±0.5 μm, operating voltage of 20 V and a structural resonance frequency of 15 kHz. We manufactured the metallic actuator by using thick photoresist lithography and nickel electroplating. The electrostatic gap between the mover and the stator has a high aspect ratio, in order to achieve low voltage operation. We deposited a copper layer by electroplating as a vertical sacrificial layer. Then we removed the copper layer at last process step to make the electrostatic gap with high aspect ratio. We utilize a photoresist which has a thickness of 10 μm as the first trial. We completed the process and operated the actuator successfully. We also developed a silicon actuator using the silicon deep etching and deposition technology. We use an Inductive Coupled Plasma-Reactive Ion Etching (ICP-RIE) machine for silicon etching and a Low Pressure Chemical Vapor Deposition (LPCVD) machine for deposition of the vertical sacrificial layer of SiO2 and the mover structure of polySi. We obtained an actuator which had thickness of 100 μm with the electrode gap having a aspect ratio of 50.","PeriodicalId":150257,"journal":{"name":"Journal of Micromechatronics","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2002-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115106344","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2002-04-01DOI: 10.1163/156856302766647134
K. Yamaguchi, T. Nakamoto, Takayoshi Obata
—Laser photolithography is a useful method for producing micro parts. One of the main factors affecting the accuracy of the polymer part is shrinkage during solidification. The shrinkage has an effect on the irradiated energy distribution on the polymer because the polymer is shrinking during the irradiation. The shrinkage and irradiated energy distribution cause manufacturing errors. The manufacturing accuracy when producing a micro part is calculated in this paper. Next, the polymer part is reinforced by addition of unidirectional whiskers. Whiskers are added to the liquid photopolymer and this mixture is placed in a vessel that has electrodes. By applying direct current (DC) to the electrodes, the axis of the whiskers in the liquid polymer is aligned along the direction of the electric field. The polymer is solidified by the irradiation of UV laser during the application of the direct current. The shrinkage ratio during the solidification is decreased and the tensile strength of the polymer part is increased by the addition of unidirectional whiskers.
{"title":"Micro parts reinforced by addition of unidirectional whiskers in laser photolithography","authors":"K. Yamaguchi, T. Nakamoto, Takayoshi Obata","doi":"10.1163/156856302766647134","DOIUrl":"https://doi.org/10.1163/156856302766647134","url":null,"abstract":"—Laser photolithography is a useful method for producing micro parts. One of the main factors affecting the accuracy of the polymer part is shrinkage during solidification. The shrinkage has an effect on the irradiated energy distribution on the polymer because the polymer is shrinking during the irradiation. The shrinkage and irradiated energy distribution cause manufacturing errors. The manufacturing accuracy when producing a micro part is calculated in this paper. Next, the polymer part is reinforced by addition of unidirectional whiskers. Whiskers are added to the liquid photopolymer and this mixture is placed in a vessel that has electrodes. By applying direct current (DC) to the electrodes, the axis of the whiskers in the liquid polymer is aligned along the direction of the electric field. The polymer is solidified by the irradiation of UV laser during the application of the direct current. The shrinkage ratio during the solidification is decreased and the tensile strength of the polymer part is increased by the addition of unidirectional whiskers.","PeriodicalId":150257,"journal":{"name":"Journal of Micromechatronics","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2002-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126179886","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2001-10-01DOI: 10.1163/156856301320819534
Xudong Li, G. Zong, S. Bi, Wei Zhao
Urgent needs in many application fields make research on micromanipulating systems a popular topic. Although many such systems have been presented, few can be used for biological micromanipulations. Developing an automatic micromanipulating system can not only meet the needs of the industrialization and real application, but also facilitate the progress of some theoretical and technological issues. In this paper, a dual-manipulator micromanipulating system with visual servo control, which is specially designed for automatic manipulating biological microscopic objects, is presented. The system configuration and the key techniques related to visual servo control, such as auto-focusing, object-tracking, are introduced as well.
{"title":"Automatic micromanipulating system for biological applications with visual servo control","authors":"Xudong Li, G. Zong, S. Bi, Wei Zhao","doi":"10.1163/156856301320819534","DOIUrl":"https://doi.org/10.1163/156856301320819534","url":null,"abstract":"Urgent needs in many application fields make research on micromanipulating systems a popular topic. Although many such systems have been presented, few can be used for biological micromanipulations. Developing an automatic micromanipulating system can not only meet the needs of the industrialization and real application, but also facilitate the progress of some theoretical and technological issues. In this paper, a dual-manipulator micromanipulating system with visual servo control, which is specially designed for automatic manipulating biological microscopic objects, is presented. The system configuration and the key techniques related to visual servo control, such as auto-focusing, object-tracking, are introduced as well.","PeriodicalId":150257,"journal":{"name":"Journal of Micromechatronics","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2001-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132506790","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2001-10-01DOI: 10.1163/156856301320819516
H. Shin, Bumkyoo Choi, H. Ko, Y. Yoon
[A new design of micromachined mirror array for display purposes is presented. Integrating multiple functions into a component and extensive use of photo-lithography make this design of mirror simple as well as easy to make. The prototype is fabricated in an array of 50 × 50 micromirrors. The size of mirror plate is 50 × 50 μm2 and the gap between them is 3 μm. The mirror plate is tilted by the electrostatic force, and the angle is designed to be 10°. Driving voltage for the finished micromirrors is 28 V and the tilt angle is measured as 8.9°. The response time from rest to full tilt and back to rest position is about 20 μs when it is driven at the natural frequency of 24.7 kHz. From the reliability point of view, the importance of anti-stiction coating cannot be over-stressed. Without one, most of the mirrors could not survive a few contacts with the substrate. However, when proper anti-stiction coating is applied and the atmosphere is controlled to eliminate humidity, 94.6% of the micromirrors were still rocking after 1.15 × 1010 cycles. In a series of experiments, it was possible to show this new design of micromirror array could be used as a display device, when they are driven at a certain combination of addressing and bias signals. A variable character generation and PWM-type brightness control is successfully demonstrated., A new vibrating gyroscope using parallel beam structure has the following significant features: (1) The sensing device does not interfere with the reference vibration of a driving device; (2) This structure can convert a small Coriolis force into a large concentrated strain; (3) Resonance frequency of the driving device and the sensing device can be easily adjusted by changing the mass of the tip; (4) Mechanical coupling can be suppressed by applied voltage to the sensing device. However, this gyroscope is unsuitable for mass-production, since the structure is complicated. In this paper, we solve this problem by a sheet metal molding and a hydrothermal method. We optimized the parallel beam gyroscope for the sheet metal molding based on FEM analysis, and applied PZT thin films by the hydrothermal method. Using these two methods, we produced a dangler type gyroscope which is suitable for mass production with the advantage of the parallel beam structure.]
{"title":"Design and fabrication of the micromirror array for projection display","authors":"H. Shin, Bumkyoo Choi, H. Ko, Y. Yoon","doi":"10.1163/156856301320819516","DOIUrl":"https://doi.org/10.1163/156856301320819516","url":null,"abstract":"[A new design of micromachined mirror array for display purposes is presented. Integrating multiple functions into a component and extensive use of photo-lithography make this design of mirror simple as well as easy to make. The prototype is fabricated in an array of 50 × 50 micromirrors. The size of mirror plate is 50 × 50 μm2 and the gap between them is 3 μm. The mirror plate is tilted by the electrostatic force, and the angle is designed to be 10°. Driving voltage for the finished micromirrors is 28 V and the tilt angle is measured as 8.9°. The response time from rest to full tilt and back to rest position is about 20 μs when it is driven at the natural frequency of 24.7 kHz. From the reliability point of view, the importance of anti-stiction coating cannot be over-stressed. Without one, most of the mirrors could not survive a few contacts with the substrate. However, when proper anti-stiction coating is applied and the atmosphere is controlled to eliminate humidity, 94.6% of the micromirrors were still rocking after 1.15 × 1010 cycles. In a series of experiments, it was possible to show this new design of micromirror array could be used as a display device, when they are driven at a certain combination of addressing and bias signals. A variable character generation and PWM-type brightness control is successfully demonstrated., A new vibrating gyroscope using parallel beam structure has the following significant features: (1) The sensing device does not interfere with the reference vibration of a driving device; (2) This structure can convert a small Coriolis force into a large concentrated strain; (3) Resonance frequency of the driving device and the sensing device can be easily adjusted by changing the mass of the tip; (4) Mechanical coupling can be suppressed by applied voltage to the sensing device. However, this gyroscope is unsuitable for mass-production, since the structure is complicated. In this paper, we solve this problem by a sheet metal molding and a hydrothermal method. We optimized the parallel beam gyroscope for the sheet metal molding based on FEM analysis, and applied PZT thin films by the hydrothermal method. Using these two methods, we produced a dangler type gyroscope which is suitable for mass production with the advantage of the parallel beam structure.]","PeriodicalId":150257,"journal":{"name":"Journal of Micromechatronics","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2001-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131619970","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2000-10-01DOI: 10.1023/B:JOMT.0000022366.14715.46
H. Sato, T. Fukuda, F. Arai, K. Itoigawa, Y. Tsukahara
{"title":"Dangler type vibrating gyroscope using the parallel beam structure formed by sheet metal molding","authors":"H. Sato, T. Fukuda, F. Arai, K. Itoigawa, Y. Tsukahara","doi":"10.1023/B:JOMT.0000022366.14715.46","DOIUrl":"https://doi.org/10.1023/B:JOMT.0000022366.14715.46","url":null,"abstract":"","PeriodicalId":150257,"journal":{"name":"Journal of Micromechatronics","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2000-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129834912","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2000-10-01DOI: 10.1023/B:JOMT.0000022365.58946.86
Yingfei Wu, Zhaoying Zhou, X. Tan
{"title":"A flexure hinge mechanism meets the demand for XY motion mechanism driven by one piezoelectric element","authors":"Yingfei Wu, Zhaoying Zhou, X. Tan","doi":"10.1023/B:JOMT.0000022365.58946.86","DOIUrl":"https://doi.org/10.1023/B:JOMT.0000022365.58946.86","url":null,"abstract":"","PeriodicalId":150257,"journal":{"name":"Journal of Micromechatronics","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2000-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132748905","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1900-01-01DOI: 10.1163/156856306777924699
M. Gauthier, S. Régnier, P. Rougeot, N. Chaillet
During microscale object manipulation, contact (pull-off) forces and non-contact (capillary, van der Waals and electrostatic) forces determine the behaviour of the micro-objects rather than the inertial forces. The aim of this article is to give an experimental analysis of the physical phenomena at a microscopic scale in dry and liquid media. This article introduces a review of the major differences between dry and submerged micromanipulations. The theoretical influences of the medium on van der Waals forces, electrostatic forces, pull-off forces and hydrodynamic forces are presented. Experimental force measurements based on an AFM system are carried out. These experiments exhibit a correlation better than 40% between the theoretical forces and the measured forces (except for pull-off in water). Finally, some comparative experimental micromanipulation results are described and show the advantages of the liquid medium.
{"title":"Analysis of forces for micromanipulations in dry and liquid media","authors":"M. Gauthier, S. Régnier, P. Rougeot, N. Chaillet","doi":"10.1163/156856306777924699","DOIUrl":"https://doi.org/10.1163/156856306777924699","url":null,"abstract":"During microscale object manipulation, contact (pull-off) forces and non-contact (capillary, van der Waals and electrostatic) forces determine the behaviour of the micro-objects rather than the inertial forces. The aim of this article is to give an experimental analysis of the physical phenomena at a microscopic scale in dry and liquid media. This article introduces a review of the major differences between dry and submerged micromanipulations. The theoretical influences of the medium on van der Waals forces, electrostatic forces, pull-off forces and hydrodynamic forces are presented. Experimental force measurements based on an AFM system are carried out. These experiments exhibit a correlation better than 40% between the theoretical forces and the measured forces (except for pull-off in water). Finally, some comparative experimental micromanipulation results are described and show the advantages of the liquid medium.","PeriodicalId":150257,"journal":{"name":"Journal of Micromechatronics","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124864666","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1900-01-01DOI: 10.1163/156856304773954287
I. Hunter, S. Martel
If the hope for nanotechnology holds true, then we may witness the emergence of new types of high-throughput factories specially conceived to operate at the nanoscale and referred to as nanofactories. It is a very difficult task to predict the exact shape and the various components of such nanofactories. This paper describes a platform that we believe may be the foundation of many future nanofactories. The platform is based on a fleet of scientific instruments configured as miniature autonomous robots, each capable of fast operations at the molecular scale. The proposed approach is briefly compared to other methods and a general description of the final version of such a platform is also provided.
{"title":"Nanofactories based on a fleet of scientific instruments configured as miniature autonomous robots","authors":"I. Hunter, S. Martel","doi":"10.1163/156856304773954287","DOIUrl":"https://doi.org/10.1163/156856304773954287","url":null,"abstract":"If the hope for nanotechnology holds true, then we may witness the emergence of new types of high-throughput factories specially conceived to operate at the nanoscale and referred to as nanofactories. It is a very difficult task to predict the exact shape and the various components of such nanofactories. This paper describes a platform that we believe may be the foundation of many future nanofactories. The platform is based on a fleet of scientific instruments configured as miniature autonomous robots, each capable of fast operations at the molecular scale. The proposed approach is briefly compared to other methods and a general description of the final version of such a platform is also provided.","PeriodicalId":150257,"journal":{"name":"Journal of Micromechatronics","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125058991","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1900-01-01DOI: 10.1163/156856301760132132
F. Arai, Hiroo Mizoguchi, K. Sekiyama, T. Fukuda
In this paper, we present the design of our small robot MARS (Micro Autonomous Robotic System) and basic experiments on coordination of group behavior. MARS is a small mobile autonomous robot. The robot has sensors, actuators, CPU, battery, and infrared communication device. The robot can get a program from the host computer through the wireless communication system. Moreover, the robot can exchange information with the other robot through the wireless communication system. Here we propose a method to coordinate and control the group behavior based on the immune network algorithm. Using this platform, we tried the basic experiments, such as following light and gathering. We succeeded in generation of the simple group behavior of tracking the object by the proposed method.
{"title":"Micro Autonomous Robot Systems (MARS): Coordination and control of multiple micro robots","authors":"F. Arai, Hiroo Mizoguchi, K. Sekiyama, T. Fukuda","doi":"10.1163/156856301760132132","DOIUrl":"https://doi.org/10.1163/156856301760132132","url":null,"abstract":"In this paper, we present the design of our small robot MARS (Micro Autonomous Robotic System) and basic experiments on coordination of group behavior. MARS is a small mobile autonomous robot. The robot has sensors, actuators, CPU, battery, and infrared communication device. The robot can get a program from the host computer through the wireless communication system. Moreover, the robot can exchange information with the other robot through the wireless communication system. Here we propose a method to coordinate and control the group behavior based on the immune network algorithm. Using this platform, we tried the basic experiments, such as following light and gathering. We succeeded in generation of the simple group behavior of tracking the object by the proposed method.","PeriodicalId":150257,"journal":{"name":"Journal of Micromechatronics","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125888170","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1900-01-01DOI: 10.1163/156856301760132105
R. Yeh, S. Hollar, K. Pister
We are creating a class of autonomous low-power silicon articulated microrobots fabricated on a 1 cm2 silicon die and mounted with actuators, a controller, and a solar array. By taking advantage of the high force-density of electrostatic actuators in the micro scale, low-power actuators can be made for microrobots. A micromotor with an energy efficiency of 4%, that uses CMOS-compatible supply voltage, and has a motion resolution of 2 μm has been demonstrated in a volume of 0.015 mm3. Articulated two degrees-of-freedom legs with built-in mechanical couplings have been fabricated in a commercial micromachining foundry (MUMPs) and successfully assembled. Lowpower CMOS electronics will be used to control the robot locomotion and a solar array chip will be used to power the microrobot.
{"title":"Design of low-power silicon articulated microrobots","authors":"R. Yeh, S. Hollar, K. Pister","doi":"10.1163/156856301760132105","DOIUrl":"https://doi.org/10.1163/156856301760132105","url":null,"abstract":"We are creating a class of autonomous low-power silicon articulated microrobots fabricated on a 1 cm2 silicon die and mounted with actuators, a controller, and a solar array. By taking advantage of the high force-density of electrostatic actuators in the micro scale, low-power actuators can be made for microrobots. A micromotor with an energy efficiency of 4%, that uses CMOS-compatible supply voltage, and has a motion resolution of 2 μm has been demonstrated in a volume of 0.015 mm3. Articulated two degrees-of-freedom legs with built-in mechanical couplings have been fabricated in a commercial micromachining foundry (MUMPs) and successfully assembled. Lowpower CMOS electronics will be used to control the robot locomotion and a solar array chip will be used to power the microrobot.","PeriodicalId":150257,"journal":{"name":"Journal of Micromechatronics","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"117002234","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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