Piezoelectric composites for micro-ultrasonic transducers realized with deep-etch X-ray lithography

Y. Hirata, H. Okuyama, S. Ogino, T. Numazawa, H. Takada
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引用次数: 20

Abstract

PIEZOELECTRIC COMPOSITES FOR MICRO-ULTRASONIC TRANSDUCERS REALIZED WITH DEEP-ETCH X-RAY LITHOGRAPHY Yoshihiro Hirata, Hiroshi Okuyama, Seiji Ogino* Toshiyuki Numzawa and Hiroshi Takaah Harima Research Laboratories, Sumitomo Electric Industries, Ltd. 1431-12 Harima Science Garden City, Kamigori, Hyogo 678-12, Japan Piezoelectric ceramics/polymer composites have been developed for micro-ultrasonic transducers. These composites are made up of micro rods of lead zirconate titanate (PZT) ceramics with high aspect ratio (diameter: 17pm, height: up to 120pm, density: 1,700 rods/"*). PZT rods were fabricated using deep-etch X-ray lithography, PZT slurry casting into a resist structure, plasma etching for resist removal, and sintering. Piezoelectric coefficient d , frequency constant N, and electromechanical coupling coefficient k of the composites were measured, and these composites were proven to have good piezoelectricity.
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用深蚀刻x射线光刻技术实现微超声换能器用压电复合材料
hirohiro Hirata, Hiroshi Okuyama, Seiji Ogino* Toshiyuki Numzawa和Hiroshi Takaah Harima研究实验室,住友电气工业有限公司,Harima Science Garden City, Kamigori, Hyogo 678-12, Japan压电陶瓷/聚合物复合材料已经开发用于微超声波换能器。这些复合材料由锆钛酸铅(PZT)陶瓷的微棒组成,具有高宽高比(直径:17pm,高度:高达120pm,密度:1,700棒/“*)。采用深蚀刻x射线光刻、PZT浆液铸造成抗蚀剂结构、等离子蚀刻去除抗蚀剂和烧结制备PZT棒。测试了复合材料的压电系数d、频率常数N和机电耦合系数k,证明了复合材料具有良好的压电性。
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