A 2000°/s dynamic range bulk mode dodecagon gyro for a commercial SOI technology

Abstract

This paper reports on the design and suggested fabrication steps of a bulk mode dodecagon disk gyroscope. A major contribution of this work, compared to prior art, is that it enables the fabrication of this important class of gyroscopes in commercially available and low-cost SOI technologies — e.g. MEMSCAP's SOIMUMPs. The structure was simulated using COMSOL, operates at 8.14 MHz, and exhibits a competitive rate sensitivity of ∼2.3 pA/°/s, a high dynamic range of 2000°/s, and a mechanical noise of 1°/√hr, for a quality factor of 10,000.