{"title":"Planar centering mechanism for dielectrically liquid lens","authors":"C.G. Tsai, L.S. Chen, C.L. Peng, J. Yeh","doi":"10.1109/OMEMS.2008.4607873","DOIUrl":null,"url":null,"abstract":"Two types of planar centering mechanism with shape edge were fabricated and demonstrated their performance in this paper, which effectively reduce the tilt angle of dielectrically liquid lens to 0.2deg.","PeriodicalId":402931,"journal":{"name":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","volume":"95 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2008-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/OMEMS.2008.4607873","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
Two types of planar centering mechanism with shape edge were fabricated and demonstrated their performance in this paper, which effectively reduce the tilt angle of dielectrically liquid lens to 0.2deg.
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