Statistical circuit simulation with measurement-based active device models: implications for process control and IC manufacturability

D. Root, D. McGinty, B. Hughes
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引用次数: 13

Abstract

This paper presents a new approach to statistical active circuit design which unifies device parametric-based process control and non-parametric circuit simulation. Predictions of circuit sensitivity to process variation and yield-loss of circuits fabricated in two different GaAs IC processes are described. The simulations make use of measurement-based active device models which are not formulated in terms of conventional parametric statistical variables. The technique is implemented in commercially available simulation software (HP MDS).
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统计电路仿真与基于测量的有源器件模型:对过程控制和集成电路可制造性的影响
提出了一种将基于器件参数的过程控制与非参数电路仿真相结合的统计有源电路设计新方法。描述了两种不同GaAs集成电路工艺中电路对工艺变化的灵敏度和产率损失的预测。仿真利用了基于测量的有源器件模型,这些模型不是用传统的参数统计变量表示的。该技术在商用仿真软件(HP MDS)中实现。
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